Diamond Screening Apparatus for CMP Conditioner Yield
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Solution Overview
Problem
Existing diamond screening methods for chemical mechanical polishing conditioners are ineffective in improving productivity and yield, as they primarily detect and remove risk diamonds after brazing, leading to scratches and breakages during the polishing process.
Innovation Solution
A diamond screening apparatus with a working platform, conveyor, image capture device, and image recognition module that analyzes geometric feature parameters to identify and remove risk diamonds from diamond particles before the brazing process, using a pick and place device to replace them with normal diamonds.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If risk diamonds are detected and removed after brazing, then detection accuracy is improved, but productivity deteriorates due to rework and scrap
Solution Approach 1:
The patent applies preliminary action by implementing risk diamond detection and removal before the brazing process. The screening apparatus identifies risk diamonds in the diamond particle layer on the substrate surface prior to brazing, allowing defective particles to be removed and replaced with normal diamonds before they cause scratches or breakages during polishing. This prevents rework and scrap after brazing, thereby improving productivity while maintaining detection accuracy.
2Difficulty of detecting and measuring
If visual observation with optical microscope is used, then detection capability is improved, but time consumption increases
Solution Approach 1:
The patent replaces the mechanical visual observation method with an automated screening apparatus. The apparatus includes a substrate surface processing unit that automatically detects and removes risk diamonds, and a risk diamond determination unit that identifies defective particles based on detection data. This automation eliminates manual microscope observation, significantly reducing time consumption while improving detection capability through systematic scanning and analysis.
Solution Approach 2:
The screening apparatus implements self-service by automatically performing detection, identification, and removal of risk diamonds without requiring manual intervention. The system processes the diamond particle layer autonomously, making real-time determinations about which particles are at risk and executing removal operations automatically, thereby eliminating the time-consuming manual observation process.
3Ease of manufacture
If risk diamonds are not removed before brazing, then manufacturing process is simplified, but product reliability deteriorates due to scratches and breakages
Solution Approach 1:
The patent implements preliminary action by integrating risk diamond detection and removal as a pre-step before brazing. The screening apparatus processes the diamond particle layer on the substrate surface to identify and remove risk diamonds before the brazing operation occurs. This ensures that only reliable, non-defective diamonds are brazed to the substrate, preventing scratches and breakages during subsequent polishing operations while maintaining manufacturing efficiency through automation.
Data Source
AI summary
The present invention relates to a diamond screening apparatus, comprising: a working platform comprising a working plane; a conveyer disposed on the working plane of the working platform for carrying a diamond matrix unit; an image capture device forming one or a plurality of captured images in different regions of the diamond matrix unit; a display device; and an image recognition module, which is electrically connected to the image capture device and the display device, performs a geometric feature parameter analysis on the captured images to determine one or a plurality of risk diamonds of the diamond matrix unit.