Diamond Substrate Separation via Light-Absorbing Ion Implantation
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Solution Overview
Problem
Existing methods for separating diamond substrates grown using vapor phase synthesis face challenges such as rough surfaces, high production costs, and incomplete separation due to the need for strong laser light, which can break the diamond and result in uneven surfaces or incomplete separation, especially for larger substrates or thin substrates.
Innovation Solution
A method involving ion implantation to create a light-absorbing layer with lower optical transparency on the substrate, allowing for controlled separation of the diamond layer by absorbing light and breaking at the ion-implanted interface, reducing the energy required for separation and ensuring flat surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If strong laser light is applied to separate the diamond layer from the substrate, then the separation speed is improved, but the diamond may be broken and the surface becomes rough
Solution Approach 1:
A light-absorbing layer is formed in advance within the diamond layer through ion implantation or vapor phase synthesis with controlled impurity incorporation. This preliminary action creates a predetermined separation interface that absorbs laser energy, enabling subsequent rapid separation without requiring excessive laser intensity that would damage the diamond surfaces.
Solution Approach 2:
The light-absorbing layer acts as an intermediary that mediates the separation process. It absorbs the laser light energy and converts it to thermal energy, creating a controlled expansion and rupture at the separation interface. This intermediary layer protects the diamond surfaces from direct laser exposure while enabling efficient separation.
2Reliability
If strong laser light is applied to separate the diamond layer from the substrate, then the separation completeness is improved, but the energy consumption increases and thermal damage occurs
Solution Approach 1:
The light-absorbing layer is localized at the separation interface between the diamond layer and substrate. This local concentration of light-absorbing material ensures that laser energy is focused precisely where separation is needed, achieving complete separation without requiring high overall energy input that would cause thermal damage to the bulk diamond.
Solution Approach 2:
The optical properties of the diamond layer are modified by incorporating light-absorbing impurities (such as nitrogen, boron, or metal atoms) at controlled concentrations. This parameter change creates a selective light absorption characteristic at the separation interface, enabling efficient energy coupling for separation while minimizing overall energy consumption and thermal effects.
3Ease of manufacture
If the substrate is made of different material to enable chemical dissolution, then the diamond extraction is simplified, but the manufacturing complexity increases
Solution Approach 1:
Both the substrate and diamond layer are made of diamond material, maintaining material homogeneity. The separation interface is created through controlled variations in crystal quality (light-absorbing layer) rather than material composition differences, simplifying the overall manufacturing process while enabling effective separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and rapid separation of diamond substrates with flat surfaces, suitable for both small and large sizes, and maintains the diamond's properties without thermal damage, reducing production costs and improving surface quality.
Implementation Method 1
applying light from a main surface of at least one of the diamond layer and the substrate to allow the light absorbing layer to absorb the light
Implementation Method 2
forming a light absorbing layer lower in optical transparency than the substrate by performing ion implantation into the substrate
Implementation Method 3
growing a diamond layer on the main surface of the substrate by the vapor phase synthesis method
Data Source
AI summary
A method of manufacturing a diamond by a vapor phase synthesis method includes: preparing a substrate including a diamond seed crystal; forming a light absorbing layer lower in optical transparency than the substrate by performing ion implantation into the substrate, the light absorbing layer being formed at a predetermined depth from a main surface of the substrate; growing a diamond layer on the main surface of the substrate by the vapor phase synthesis method; and separating the diamond layer from the substrate by applying light from a main surface of at least one of the diamond layer and the substrate to allow the light absorbing layer to absorb the light and cause the light absorbing layer to be broken up.