Diamond Window Member with Protective Layer for Plasma Light Source
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Solution Overview
Problem
Laser excitation light sources experience a phenomenon where the window member becomes opaque due to continuous driving, leading to a reduced lifespan, and existing technologies fail to effectively suppress this opacity issue.
Innovation Solution
A light emitting sealed body with a housing containing light-emitting gas, featuring window members made of diamond and protective layers of inorganic materials, such as ALD layers or specific oxides, to prevent opacity and extend the device's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If a window member is made of diamond to maintain plasma generation, then light transmission is improved, but the window member becomes opaque when continuously driven
Solution Approach 1:
The patent applies composite materials by combining diamond window member with protective layers made of different materials (silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, or titanium oxide). This composite structure allows the diamond to maintain its excellent light transmission and plasma generation properties while the protective layers prevent degradation and opacity formation during continuous operation.
Solution Approach 2:
The patent changes the material parameters of the window member by forming protective layers with specific refractive indices, thicknesses (1nm to 100nm), and material compositions. These parameter changes create a protective barrier that prevents the diamond window member from becoming opaque during continuous plasma generation, thereby maintaining reliability while preserving light transmission properties.
2Strength
If diamond is used for window member, then durability is improved, but opacity phenomenon occurs reducing lifespan
Solution Approach 1:
The patent applies preliminary action by forming protective layers on the diamond window member surface before the opacity phenomenon can occur. These pre-formed protective layers act as a barrier that prevents degradation mechanisms from affecting the diamond surface during continuous operation, thereby extending the light source lifespan while maintaining the inherent durability of diamond.
Solution Approach 2:
The patent uses relatively thin protective layers (1nm to 100nm) that can be easily deposited and potentially replaced if needed. These protective layers act as sacrificial elements that protect the expensive and durable diamond window member, allowing the diamond to maintain its long-term durability while the protective layers handle the degradation stress.
3Reliability
If protective layer is formed on diamond window member, then opacity phenomenon is suppressed, but light transmission may be reduced
Solution Approach 1:
The patent carefully controls the parameters of the protective layers, including thickness (1nm to 100nm), material composition (silicon oxide, silicon nitride, aluminum oxide, aluminum nitride, or titanium oxide), and refractive index, to minimize light transmission loss while maintaining opacity suppression. By optimizing these parameters, the protective layers maintain reliability without significantly reducing illumination intensity.
Solution Approach 2:
The patent applies protective layers with specific local properties - making them thin (1nm to 100nm) and selecting materials with appropriate refractive indices - to provide protection only where needed (on the diamond surface exposed to plasma) while minimizing impact on overall light transmission. This local quality approach maintains light transmission efficiency while ensuring reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protective layers effectively suppress the opacity phenomenon, ensuring the light emitting sealed body's extended lifespan by preventing ultraviolet light impact and foreign matter release, even at high charging pressures.
Implementation Method 1
The at least one protective layer may contain a material having a lower transmittance to ultraviolet light than a transmittance of diamond
Implementation Method 2
The at least one protective layer may include an ALD layer
Data Source
AI summary
A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.