Closed-Loop Diaphragm Pump Controller for Pulsation Reduction

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Solution Overview

Problem

Diaphragm pumps in semiconductor manufacturing face challenges with excessive pulsation in discharge flow, requiring time-consuming manual adjustments of parameters like air supply pressure, vacuum pressure, cycle time, and pump head air supply orifice size, often using open-loop systems without performance feedback.

Innovation Solution

A closed-loop control system for diaphragm pumps that automatically adjusts parameters such as air supply pressure, vacuum pressure, cycle time, and pump head air supply orifice size using a pump controller, enabling precise control of flow rate and pulsation performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual adjustment of pump parameters is performed, then pump performance can be optimized, but time consumption and operational complexity increase

Engineering Contradiction:
Improvepump performanceVSAvoidadjustment time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent implements a closed-loop control system that continuously monitors pump discharge flow and provides feedback to automatically adjust pump parameters. Sensors measure the actual flow rate and pulsation levels, and the controller uses this feedback information to dynamically tune parameters such as air supply pressure, vacuum pressure, and cycle time, eliminating manual trial-and-error adjustments while maintaining optimal performance

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The control system is designed to automatically self-regulate pump operation without human intervention. The system autonomously monitors performance parameters, detects deviations from desired operation, and adjusts control parameters in real-time, enabling the pump to maintain optimal performance independently and reducing operational time loss

Inventive Principle:
Principle #25Self-service

2Device complexity

If open-loop control system is used, then device complexity is reduced, but continuous manual monitoring and adjustment are required

Engineering Contradiction:
Improvecontrol system complexityVSAvoidoperational ease
Core Design Contradiction:
Device complexityVSEase of operation

Solution Approach 1:

The patent transitions from open-loop to closed-loop control by implementing continuous feedback mechanisms. Sensors monitor discharge flow rate and pulsation characteristics, and this information is fed back to the controller which automatically adjusts pump parameters. This feedback loop eliminates the need for continuous manual monitoring while improving ease of operation, as the system self-corrects performance deviations automatically

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical adjustment operations with an automated electronic control system. The controller uses electronic signals to adjust pneumatic and vacuum pressures, cycle timing, and other parameters based on sensor feedback, substituting complex manual monitoring and adjustment tasks with an automated system that improves operational ease without significantly increasing perceived device complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If trial and error approach is used for parameter adjustment, then satisfactory performance can be achieved, but productivity is reduced

Engineering Contradiction:
Improvepump performanceVSAvoidoperational efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The closed-loop control system continuously monitors pump discharge flow and provides real-time feedback to automatically adjust parameters, eliminating the need for trial-and-error approaches. The system rapidly converges to optimal performance by using sensor data to guide parameter adjustments, significantly improving operational efficiency and productivity while maintaining reliable pump performance

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The control system is pre-programmed with optimal parameter settings and control algorithms that guide the adjustment process. When the pump is started or performance deviations occur, the system automatically applies pre-calculated adjustments based on desired performance targets, eliminating the need for operators to perform time-consuming trial-and-error tuning and thereby improving productivity

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS10508648B2Automated cross-phase pump and controller
Publication Date: 2019.12.17 TREBOR INTERNATIONAL INC
  • US10508648B2 patent drawing
  • US10508648B2 patent drawing
  • US10508648B2 patent drawing

AI summary

In one example, a fluid system is provided that includes an air-operated fluid pump, a control air system operably connected with the fluid pump, and a pump controller operably connected with one or more components of the control air system. The pump controller is configured to automatically control the operation of the air-operated fluid pump by way of the control air system. The fluid pump parameters automatically controlled by the pump controller can include a discharge flow rate of the fluid pump, a discharge pressure of the fluid pump, and/or a pulsation value associated with the discharge of the fluid pump.