Diaphragm Valve Full-Open Adjustment for Consistent Flow Rate
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Solution Overview
Problem
Dimensional differences and shape variations in diaphragm valve components during manufacturing lead to inaccuracies in flow rate control, especially at high temperatures, requiring cumbersome individual adjustments for semiconductor manufacturing processes.
Innovation Solution
A manually-operated diaphragm valve with a full-open position adjustment mechanism using a pin and set screw system, allowing for precise rotation angle control and flow rate adjustment without increasing the valve's size, ensuring consistent flow rates despite component variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a rotation restriction structure by engagement between the coupling pin and the coupling pin groove is provided to restrict the rotation angle of the handle, then the flow rate at full open can be set, but dimensional differences and shape variations in components during manufacture cause errors in the rotation angle and individual differences in the flow rate at full open
Solution Approach 1:
The invention transforms the fixed, rigid rotation restriction structure into a dynamic, adjustable one. The coupling pin is made movable along the arc-shaped groove through a pressing mechanism (spring or elastic member), allowing the rotation angle to be adjusted according to actual component variations while maintaining reliable engagement. This resolves the contradiction by making the restriction structure adaptable rather than static.
Solution Approach 2:
The invention allows changing the rotation angle parameter of the handle by adjusting the position of the coupling pin along the arc-shaped groove. This enables the flow rate at full open to be precisely controlled by modifying the engagement position, thereby compensating for manufacturing tolerances and ensuring accurate flow rate settings despite component variations.
2Volume of moving object
If the rotation angle of the handle is restricted by a concave-convex-shaped engaging portion, then the structure remains compact, but it is difficult to suppress differences in the Cv value due to individual differences in the valve
Solution Approach 1:
The coupling pin is designed to be movable along the arc-shaped groove rather than fixed, allowing adjustment of the rotation angle while maintaining the compact structure. The pressing mechanism ensures reliable engagement at any position along the groove, enabling both compactness and Cv value consistency to be achieved simultaneously.
Solution Approach 2:
The invention provides a feedback mechanism where the coupling pin can be adjusted along the arc-shaped groove to compensate for individual differences in the valve components. By observing the actual flow rate or rotation angle, the position of the coupling pin can be fine-tuned to achieve the desired Cv value, thereby suppressing variations due to manufacturing tolerances.
3Reliability
If individual flow-rate adjustment is performed for all automatic diaphragm valves on the secondary side, then uniform manufacturing process results are achieved, but the adjustment becomes very cumbersome
Solution Approach 1:
The invention performs preliminary adjustment of the rotation angle at the valve assembly stage by positioning the coupling pin along the arc-shaped groove. This preliminary action ensures that the flow rate at full open is correctly set before installation, eliminating the need for cumbersome individual adjustments on the secondary side and achieving uniform manufacturing process results more easily.
Data Source
AI summary
A manually-operated diaphragm valve in which the open/close range of a valve disk can be set while compactness is maintained with a simple structure, and a sufficient flow rate at the time of full open is ensured. A valve main body (1) includes a valve disk (12) attached inside a body (10) and a spindle (13) screw-fastened to the body so as to be able to ascend and descend to cause the valve disk to make contact with and go away from a valve seat (14). A handle for manually performing rotating operation of the spindle is mounted above the valve main body. A full-open position adjustment mechanism (20) which limits rotation of the handle on a valve-opening operation side at full open and sets an upper limit of a flow rate when the valve disk is fully open is provided near an upper portion of the valve main body.