Diaphragm Valve Flow Path Layout for Higher Gas Throughput
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Solution Overview
Problem
Existing valve devices in semiconductor manufacturing, such as those described in Japanese Patent Application Publication No. H08-5115853, are unable to sufficiently increase gas flow rate despite enlarging the diameter of the first side groove near the valve chamber.
Innovation Solution
A three-way valve device with a body featuring a valve chamber, first and second inflow passages, an outflow passage, and an annular groove, where the first inflow passage is branched into multiple flow passages with an inflow port and outflow ports opening into the annular groove, increasing the cross-sectional area and flow rate by allowing fluid to flow into the annular groove without disturbance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the diameter of the first side groove is enlarged near the valve chamber, then the gas flow path area is increased, but the flow rate cannot be sufficiently increased
Solution Approach 1:
The first inflow passage is divided into multiple flow passages (first, second, third flow passages) that branch out and open into the annular groove. This segmentation allows gas to flow through multiple parallel paths simultaneously, increasing the total flow rate while maintaining a compact structure. The annular groove acts as a common collection point for these segmented flow passages.
Solution Approach 2:
The invention transitions from a single linear flow path to a multi-dimensional flow structure by introducing the annular groove as a circular collection chamber. Multiple flow passages radiate into this annular groove from different positions, creating a three-dimensional flow distribution pattern that increases effective flow area without simply enlarging a single groove diameter.
2Productivity
If multiple flow passages are introduced to increase flow rate, then the productivity is improved, but the device complexity increases
Solution Approach 1:
Multiple separate flow passages are merged into a single annular groove structure. Instead of having multiple independent outlets, all flow passages converge into the circular annular groove, which then connects to the valve chamber. This merging approach maintains the benefits of multiple flow paths while simplifying the overall structure by providing a unified collection point.
Solution Approach 2:
The annular groove serves multiple functions simultaneously: it acts as a collection chamber for multiple flow passages, provides a uniform distribution of gas into the valve chamber, and simplifies the connection architecture. This multi-functionality reduces the need for additional components and simplifies the overall device structure.
Data Source
AI summary
A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.