Diaphragm Valve Flow Path Layout for High Cv in Compact Bodies
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Solution Overview
Problem
Conventional diaphragm valves struggle to achieve a stable high flow rate and Cv value while maintaining a compact size, which is essential for semiconductor manufacturing applications, as they often compromise on flow path capacity and body strength when trying to increase flow rates, leading to inefficiencies and potential sealability issues.
Innovation Solution
The design incorporates an annular groove with a secondary-side flow path having an inner diameter 2.0 to 4.5 times the groove width, ensuring a sufficient flow path capacity without compromising body strength, by maintaining a smaller intersection cross-sectional area between the annular groove and the secondary-side flow path, which is at least 35% of the secondary-side flow path's cross-sectional area, allowing for a stable high flow rate without excessive cutting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the valve size is increased to enhance flow-path capacity, then the flow rate (Cv value) is improved, but the valve occupies more space and increases clean room capacity requirements
Solution Approach 1:
The invention optimizes the flow path configuration by creating a three-dimensional flow path structure within the compact valve body. The flow path is designed to extend in multiple directions and utilize vertical space, effectively increasing the flow path capacity without increasing the external dimensions of the valve body. This dimensional optimization allows the compact valve to achieve high flow rates comparable to larger valves.
2Productivity
If the secondary-side flow path is enlarged to increase flow capacity, then the flow rate is improved, but the body strength is compromised due to excessive cutting
Solution Approach 1:
The invention applies local quality optimization by strategically designing the flow path geometry. The secondary-side flow path is enlarged only in specific regions where flow capacity is needed, while maintaining sufficient material thickness and structural integrity in other critical areas of the valve body. The flow path cross-sectional area is optimized to be at least 35% of the secondary-side flow path area, ensuring adequate flow capacity without compromising overall body strength.
3Volume of stationary object
If the valve is downsized to a compact form, then the occupying space is reduced, but the flow-path capacity is limited and high flow rate is difficult to achieve
Solution Approach 1:
The invention implements a nested flow path structure where the primary-side flow path and secondary-side flow path are arranged in a nested configuration within the compact valve body. The flow paths are positioned to utilize the available internal space efficiently, with the secondary-side flow path nested adjacent to the primary-side flow path. This nested arrangement maximizes the flow path capacity within the limited volume of the compact valve body.
4Productivity
If the intersection cross-sectional area between annular groove and secondary-side flow path is increased, then the flow rate is improved, but the manufacturing complexity increases
Solution Approach 1:
The invention optimizes the intersection cross-sectional area parameter to be at least 35% of the secondary-side flow path cross-sectional area. This parameter optimization achieves a balance between flow rate performance and manufacturing ease. The standardized percentage requirement simplifies the manufacturing process by providing a clear design criterion, eliminating the need for complex custom geometries while ensuring adequate flow capacity through the annular groove intersection.
Data Source
AI summary
A diaphragm valve includes a valve seat disposed in a valve chamber in a body, an annular groove provided on the outer periphery of the valve seat, a diaphragm provided so as to be able to make contact with and leave the valve seat via a pressurizing device, and a primary-side flow path communicating the valve chamber, in which an inner diameter of a secondary-side flow path contiguously provided to the annular groove is 2.0 to 4.5 times a groove width of the annular groove, and an intersection cross-sectional area between the annular groove and the secondary-side flow path is smaller than a cross-sectional area of the secondary-side flow path and the intersection cross-sectional area is configured to be equal to or larger than 35% with respect to a sectional area of the secondary-side flow path to acquire a predetermined Cv value.