Diaphragm Valve Structure for Stable High-Flow Gas Control
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Solution Overview
Problem
Existing valve devices in semiconductor manufacturing struggle to control high flow rates of process gases in a stable manner, which is crucial for processes like atomic layer deposition (ALD), where precise and consistent gas supply is necessary for film deposition on substrates.
Innovation Solution
A valve device with a unique design featuring a valve body forming two flow paths, an inner disc with annular parts, a diaphragm that contacts the outer annular part to control flow, and a pressing adapter that sandwiches the diaphragm, allowing for stable control of high flow rates by ensuring continuous and discontinuous flow paths through its open and closed positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional valve device structure is used, then the device complexity is low, but the flow rate control stability deteriorates at high flow rates
Solution Approach 1:
The valve device is divided into multiple functional components: a valve body with separate first and second flow paths, an inner disc with inner and outer annular parts, a diaphragm for actuation, and a pressing adapter. This segmentation allows each component to perform its specific function optimally, contributing to stable high flow rate control while maintaining a manageable overall structure.
Solution Approach 2:
The patent introduces a radial dimension by implementing annular structures (inner annular part and outer annular part) in addition to the axial flow paths. This dimensional change allows the valve to handle high flow rates more effectively by distributing flow control across different radial zones, improving stability without excessive complexity.
2Stability of the object's composition
If the diaphragm contact surface position is not optimized, then the manufacturing is simpler, but the deformation control deteriorates
Solution Approach 1:
The outer annular part is designed with a specific local geometry where the diaphragm contact surface is positioned at a predetermined radius. This local quality optimization ensures that the diaphragm contacts the outer annular part at the optimal position, controlling deformation effectively while allowing for practical manufacturing tolerances.
3Reliability
If the valve structure is simplified, then the ease of manufacture is high, but the airtightness deteriorates
Solution Approach 1:
The inner disc is nested within the valve body, with the inner annular part positioned around the first flow path opening and the outer annular part surrounded by the diaphragm. This nested arrangement ensures airtightness through multiple contact interfaces while maintaining a compact structure that is relatively easy to manufacture as an integrated component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The valve device effectively stabilizes high flow rates, enhancing the precision and reliability of gas supply in semiconductor manufacturing processes, particularly in ALD, by minimizing deformation and maintaining airtightness, thus supporting the precise film deposition requirements.
Implementation Method 1
a diaphragm that, at a peripheral edge part thereof, comes into contact with the outer annular part, and makes the first flow path and the second flow path continuous and discontinuous by moving between an open position of non-contact and a closed position of contact with the valve seat
Implementation Method 2
a pressing adapter that sandwiches the peripheral edge part of the diaphragm with the outer annular part, and comes into contact with the peripheral edge part
Data Source
AI summary
A valve device includes: a valve body that forms a first flow path and a second flow path; an inner disc that includes an inner annular part disposed around an opening of the first flow path, an outer annular part disposed on an outer peripheral side of the inner annular part, and a connecting part that includes a plurality of openings that communicates with the second flow path and that connects the inner annular part and the outer annular part; a valve seat disposed on the inner annular part; and a diaphragm that, at a peripheral edge part of the diaphragm, comes into contact with the outer annular part and makes the first flow path and the second flow path continuous and discontinuous by moving between an open position of non-contact and a closed position of contact with the valve seat.