Diaphragm Valve Inner Disk Assembly for Stable Cv and Seal Crushing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing valve devices in semiconductor manufacturing, such as those described in PTL 2, face issues with insufficient crushing of the disk seal, leading to a small Cv value and potential damage to the inner disk due to excessive force, which affects the efficient flow of fluids and assembly precision.
Innovation Solution
The valve device incorporates an annular valve chamber bottom surface protruding portion that facilitates easier assembly and reduces the risk of damage by allowing the inner disk to be positioned correctly, with a lower side seat accommodated in a groove and a gap to accommodate the bulging portion when the diaphragm is pressed, ensuring proper crushing and assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the disk seal is crushed by screwing the bonnet to position the inner disk, then the inner disk can be disposed at a predetermined position, but the close contact between flat surfaces fails to sufficiently crush the disk seal, resulting in a small gap between the valve seat and diaphragm and a problematically small Cv value
Solution Approach 1:
The invention replaces the flat bottom surface with a curved (spheroidal) surface. The curved surface of the bonnet and the corresponding curved pressing surface on the inner disk create point or line contact rather than face contact, concentrating the pressing force to sufficiently crush the disk seal while maintaining proper positioning of the inner disk, thereby achieving both positioning precision and adequate Cv value
2Manufacturing precision
If the bonnet is screwed to press the diaphragm and position the inner disk, then the inner disk can be disposed at a predetermined position, but the connection portion between inner side annular portion and outer side annular portion receives excessively large force and may be damaged
Solution Approach 1:
The curved pressing surface distributes the compressive force more favorably across the disk seal and inner disk structure. The spherical contact geometry creates a more uniform stress distribution that avoids concentration of excessive force on the vulnerable connection portion, preventing damage while achieving proper positioning
3Quantity of substance
If a deeper valve chamber is used to process large amount of fluid, then the valve can handle larger fluid volumes, but the assembly and positioning of inner disk becomes more difficult
Solution Approach 1:
The curved pressing surface and spherical contact mechanism provide self-aligning properties that guide the inner disk into the correct position during assembly. This curvature-based design simplifies the positioning process in deeper valve chambers, making assembly easier while maintaining the increased fluid processing capacity enabled by the deeper chamber design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures a sufficient Cv value is maintained while reducing the risk of inner disk damage, enabling efficient fluid flow and easy assembly, addressing the issues of force distribution and assembly precision.
Implementation Method 1
The annular valve chamber bottom surface protruding portion comes into close contact with a part of the lower side seat lower end surface... whereby the lower side seat is crushed from the above
Implementation Method 2
the diaphragm coming into contact with and separated from an annular upper side seat... the diaphragm having an upper surface circumference edge portion pressed downwardly by a press adapter to make the diaphragm disposed under pressure
Data Source
AI summary
An object of the invention is to provide a valve device and the like including an inner disk that can be easily assembled, in which a Cv value is guaranteed and the inner disk is provided under a lower risk of being damaged. The valve device includes a valve body including first flow path, and a valve chamber; an inner disk including an inner side annular portion that is disposed in a periphery of a first opening, an outer side annular portion, and a connection portion; a diaphragm coming into contact with and separated from an annular upper side seat provided at an upper end portion of the inner side annular portion to cause interruption and communication between the flow paths; and an annular lower side seat that is provided at a lower end portion of the inner side annular portion.