Diaphragm Fluid Valve and Recirculation Layout for Drip Prevention
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing fluid devices for semiconductor production and liquid handling lack simplicity, compactness, and reliable operation, particularly in preventing undesired dripping during metering processes.
Innovation Solution
A fluid device with at least one valve unit and one recirculation unit, each with an elastically deformable diaphragm and an actuation unit, where the units are designed to be identical, minimizing production costs and enabling efficient media separation and suck-back functionality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If valve unit and recirculation unit are designed with identical construction, then production costs are minimized and manufacturing simplicity is improved, but device functionality must be ensured through proper fluidic connection arrangement
Solution Approach 1:
The patent applies universality by designing the valve unit and recirculation unit with identical construction, where both units use the same diaphragm design, actuation unit configuration, and fluid chamber structure. This standardized design allows single-source manufacturing and reduces production costs while maintaining functional differentiation through their respective positions in the fluid path.
Solution Approach 2:
The patent segments the fluid device into functionally distinct but structurally identical valve unit and recirculation unit modules. Each unit is independently designed with its own fluid chamber, diaphragm, and actuation mechanism, allowing modular assembly and simplified manufacturing while achieving complex fluid handling functionality through their combination.
2Reliability
If suck-back effect is used to prevent undesired dripping, then fluid handling reliability is improved, but additional recirculation unit and associated components are required
Solution Approach 1:
The patent applies preliminary anti-action by implementing a recirculation unit that creates negative pressure to suck back fluid before undesired dripping can occur. The recirculation unit is positioned to intercept and redirect fluid flow, preventing dripping at the discharge opening by applying a counteracting suction force in advance.
Solution Approach 2:
The connection channel serves as an intermediary element that fluidically links the valve unit and recirculation unit. This intermediate channel allows the recirculation unit to access and manipulate fluid from the valve unit, enabling the suck-back effect without requiring direct integration of the two units into a single complex structure.
3Productivity
If continuous fluidic connection exists between connection channel and discharge channel via recirculation unit, then fluid recirculation is ensured, but fluid path complexity increases
Solution Approach 1:
The patent ensures continuous fluid recirculation by establishing an unbroken fluidic path from the connection channel through the recirculation unit's fluid chamber to the discharge channel. This continuous connection allows fluid to be constantly recirculated through the recirculation unit, maintaining productive fluid flow without interruption while the modular design keeps the fluid path manageable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fluid device achieves reliable and precise fluid handling by preventing undesired dripping through the suck-back effect, while its compact and cost-effective design enhances operational efficiency in semiconductor and laboratory applications.
Implementation Method 1
each having a fluid chamber (23, 24) designed to receive a fluid... wherein each of the fluid chambers (23, 24) is delimited by an elastically deformable diaphragm (29, 30)... an actuation unit (62, 162) through which the associated valve diaphragm (29) or recirculation diaphragm (30) can be adjusted within the meaning of a change in volume of the associated fluid chamber (23, 24) by elastic deformation
Implementation Method 2
The suck-back effect can be caused by a negative pressure which can be generated in a fluid chamber of the fluid device to which the fluid channel is connected
Implementation Method 3
offering the possibility of sucking back a fluid located in a fluid channel in order to prevent undesired dripping at a discharge opening
Data Source
AI summary
A fluid device has at least one valve unit and at least one recirculation unit, each having a fluid chamber, which channels are fluidically connected to one another via at least one connection channel. The at least one feed channel discharges into the fluid chamber of the valve unit and a discharge channel discharges into the fluid chamber of the recirculation unit. Each of the fluid chambers is delimited by an elastically deformable diaphragm, and the valve unit and the recirculation unit each contain an actuation unit through which the associated valve diaphragm or recirculation diaphragm can be adjusted within the meaning of a change in volume of the associated fluid chamber. A fluidic connection can be established between the feed channel and the connection channel by the valve diaphragm and that a continuous fluidic connection exists between the connection channel and the discharge channel via the fluid chamber.