Diaphragm Valve Vent Adjustment for Matched Opening and Closing
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Solution Overview
Problem
Existing open-close valves used in semiconductor processes have valve opening and closing times that are not easily adjustable and can vary between machines, leading to uneven process gas supply.
Innovation Solution
A valve device with an adjustment mechanism that restricts the ventilation amount of vent holes, allowing for equalization of valve opening and closing times by extending these times uniformly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the valve opening time and valve closing time are adjusted to be equal, then the flow rate control precision is improved, but the device complexity increases due to the adjustment mechanism
Solution Approach 1:
The patent adjusts the valve opening time and closing time by changing the ventilation amount parameter of the vent hole. By controlling the amount of air vented from the air chamber, the timing characteristics of the valve are adjusted to achieve equal opening and closing times, thereby improving flow rate control precision without requiring complex additional mechanisms
Solution Approach 2:
The vent hole structure enables self-adjustment of valve timing through its own ventilation function. The adjustment mechanism utilizes the existing air chamber and vent hole system to automatically balance the opening and closing times, reducing the need for external complex timing control devices
2Stability of the object's composition
If the valve opening times of multiple open-close valves are matched, then the uniformity of process gas supply is improved, but the adjustment difficulty increases
Solution Approach 1:
The patent provides a unified adjustment mechanism that allows simultaneous adjustment of valve timing parameters across multiple open-close valves. By changing the ventilation amount parameter, all valves can be matched to have equal opening times, ensuring uniform process gas supply density without complex individual adjustments
Solution Approach 2:
The adjustment mechanism is designed with universal applicability to multiple open-close valves. A single adjustment operation can synchronize the valve opening times of multiple valves, making the system easy to operate while maintaining uniform gas supply across all valves
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise adjustment of valve opening and closing times to be substantially equal, ensuring consistent process gas supply across multiple valves.
Implementation Method 1
a spring member for constantly biasing the stem in a valve closing direction
Implementation Method 2
is opened against the biasing force of the spring member by supplying compressed air as a driving gas to the pressure chamber
Implementation Method 3
an air chamber communicating with the atmosphere via a vent hole formed in the actuator body
Data Source
AI summary
[Problem] To provide a valve device in which valve opening time and valve closing time are adjustable to be close to each other.[Solution] The valve device comprises: a valve body defining a flow path; a diaphragm 4 as a valve element for opening and closing the flow path; a stem 7 for making the diaphragm 4 separate and seat on a valve seat 3; a coil spring 15 as a spring member for constantly biasing the stem 7 in a valve-closing direction; a piston 30,36 connected to the stem 7; and an actuator body 20 for slidably accommodating the piston 30,36, wherein the inside of the actuator body 20 is partitioned by the piston 30,36 into a pressure chamber 31,37 to which a driving gas DG is supplied and an atmospheric chamber 32,38 communicating with the atmosphere via vent holes 21a, 21b formed in the actuator body 20, and the actuator body 20 includes an adjustment mechanism 50 capable of restricting the ventilation amounts of the vent holes 21a, 21b so as to adjust a valve closing time required for valve closing and a valve opening time required for valve opening to be equal to each other.