Semiconductor Die Attach Using Thin Preform Diffusion Soldering

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Solution Overview

Problem

The diffusion soldering process for semiconductor die attachment is costly due to significant solder material deposition and requires high force and specialized equipment, limiting throughput and efficiency.

Innovation Solution

A method involving the application of a thin solder preform with a lower melting point than the semiconductor die and substrate, which reacts to form intermetallic phases without direct pressure application, allowing for batch processing and improved solder joint quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional diffusion soldering is used with significant solder material deposition, then reliable electrical connection is achieved, but manufacturing cost increases significantly

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent changes the thickness parameter of the solder preform from traditional thick deposition to a thin preform with maximum thickness of 30 μm. This parameter change reduces solder material consumption and deposition cost while maintaining reliable electrical connection through the formation of intermetallic phases that provide adequate electrical conductivity and mechanical bonding.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite solder preform structure consisting of a core layer and outer cladding layers. The core layer provides the primary solder material for intermetallic formation, while the outer cladding layers protect the core and facilitate controlled reaction with the semiconductor die and substrate metals, ensuring reliable electrical connection with reduced overall material usage.

Inventive Principle:
Principle #40Composite materials

2Strength

If high force is applied during die attach to achieve form-fit interconnect, then mechanical bonding is improved, but equipment complexity and specialized machinery requirements increase

Engineering Contradiction:
Improvemechanical bonding strengthVSAvoidequipment complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent replaces the traditional mechanical pressure application system with a thermal diffusion process. Instead of using complex high-force pressing equipment to achieve form-fit interconnect, the invention uses controlled thermal energy to drive diffusion soldering, where the solder preform reacts with metal regions to form intermetallic phases that provide both mechanical bonding and electrical connection without requiring specialized high-force attachment equipment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If traditional diffusion soldering process is used, then soldered joint is formed, but processing time increases due to sequential individual die processing

Engineering Contradiction:
Improvesoldered joint qualityVSAvoidthroughput efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent merges multiple individual die attach processes into a single batch processing operation. By placing multiple semiconductor dies with thin solder preforms on a substrate simultaneously and applying uniform heating, the process forms soldered joints for all dies in parallel rather than sequentially. This merging of operations maintains reliable soldered joint quality through controlled intermetallic phase formation while dramatically improving throughput efficiency and reducing total processing time.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces costs by enabling efficient batch processing without mechanical pressure, forming high-melting intermetallic phases throughout the soldered joint, enhancing the reliability and efficiency of the die attach process.

Implementation Method 1

forming a soldered joint between the metal region of the semiconductor die and the metal region of the substrate via a diffusion soldering process

Methodology Applied
Scientific EffectDiffusion soldering: Diffusion Welding

Implementation Method 2

the solder preform melts and fully reacts with the metal region of the semiconductor die and the metal region of the substrate

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 3

the solder preform melts and fully reacts with the metal region of the semiconductor die and the metal region of the substrate to form one or more intermetallic phases throughout the entire soldered joint

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentEP3819058B1Method of joining a semiconductor die to a substrate using preform diffusion soldering; corresponding semiconductor device
Publication Date: 2022.10.05 INFINEON TECH AUSTRIA AG
  • EP3819058B1 patent drawingFigure 1
  • EP3819058B1 patent drawingFigure 2A~2D
  • EP3819058B1 patent drawingFigure 3

AI summary

A method of joining a semiconductor die (200) to a substrate (202) includes: applying a solder preform (204) to a metal region (212) of the semiconductor die (200) or to a metal region of the substrate (202), the solder preform (204) having a maximum thickness of 30 µm and a lower melting point than both metal regions; forming a soldered joint between the metal region (212) of the semiconductor die (200) and the metal region of the substrate (202) via a diffusion soldering process and without applying pressure directly to the die (200); and setting a soldering temperature of the diffusion soldering process so that the solder preform (204) melts and fully reacts with the metal region (212) of the semiconductor die (200) and the metal region of the substrate (202) to form one or more intermetallic phases throughout the entire soldered joint, each intermetallic phase having a melting point above the melting point of the preform (204) and the soldering temperature.