Die Bonder Imaging Using Chromatic Aberration for Multi-Depth Alignment

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Solution Overview

Problem

Current mounting apparatuses, such as die bonders, face challenges in accurately positioning and inspecting elements and substrates due to limitations in imaging and illumination techniques, particularly with varying working distances and wavelengths, which affect the precision and efficiency of the bonding process.

Innovation Solution

A mounting apparatus equipped with an imaging device, a lens with chromatic aberration, and an illumination device that emits lights of different wavelengths to image subjects at varying working distances, allowing for simultaneous imaging and inspection of both upper and side surfaces without mechanical adjustments, thereby enhancing positioning and surface inspection accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single wavelength illumination is used for imaging, then the working distance is fixed, but the ability to image subjects at different depths is limited

Engineering Contradiction:
Improvepositioning accuracyVSAvoidimaging capability at different working distances
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent changes the wavelength parameter of illumination light to adjust the focal point position. By using multiple wavelengths (e.g., blue light for shorter working distance, red light for longer working distance), the system can image subjects at different depths without mechanical adjustments, thereby resolving the contradiction between fixed working distance and multi-depth imaging capability

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If mechanical adjustments are made to change focal points for different surfaces, then imaging of multiple surfaces is possible, but the complexity and time of the process increases

Engineering Contradiction:
Improvecapability to image multiple surfacesVSAvoidmechanical adjustment complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces mechanical adjustment mechanisms with an optical solution using chromatic aberration of lenses. Different wavelengths of light naturally focus at different positions through the lens, allowing the system to image multiple surfaces (e.g., upper surface and side surface of dies) without any mechanical movement or adjustment, thus reducing device complexity and improving imaging speed

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If mechanical adjustments are made to change focal points, then different working distances can be achieved, but the positioning accuracy and efficiency decrease

Engineering Contradiction:
Improveworking distance adjustmentVSAvoidpositioning accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent eliminates mechanical adjustment mechanisms by utilizing the optical property of chromatic aberration. The lens naturally focuses different wavelengths at different positions, providing precise focal point control without mechanical intervention. This substitution maintains high positioning accuracy while enabling working distance adjustment for imaging both upper and side surfaces

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution increases the accuracy of positioning and surface inspection of elements and substrates by utilizing chromatic aberration in the lens to align focal points across different wavelengths, reducing mechanical complexity and improving bonding precision without the need for focal adjustments, thus enhancing the overall efficiency of the die bonding process.

Implementation Method 1

a lens having chroma aberration; When a subject at a position different in working distance (with different working distances) at a (each) particular wavelength is imaged, the controller emits illumination lights having different wavelengths from the illumination device, and images the subject by the imaging device through the lens

Methodology Applied
Scientific EffectChromatic aberration:

Data Source

PatentEP4312251A1Mounting apparatus and method for manufacturing semiconductor device
Publication Date: 2024.01.31 FASFORD TECH
  • EP4312251A1 patent drawingFigure 1
  • EP4312251A1 patent drawingFigure 2~3
  • EP4312251A1 patent drawingFigure 4~5

AI summary

A mounting apparatus includes: an imaging device (34); a lens (342) having chroma aberration; an illumination device (35); and a controller. When a subject (D) at a position different in working distance at a particular wavelength is imaged, the controller emits illumination lights having different wavelengths from the illumination device, and images the subject by the imaging device through the lens.