Die Bonding Illumination System for Crack Detection

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Solution Overview

Problem

The existing die bonding apparatus experiences mutual interference between oblique and coaxial illumination, which affects the accuracy of crack detection and positioning due to stray light and uneven brightness, making it difficult to detect small cracks and measure their length accurately.

Innovation Solution

The apparatus includes a light path control member that limits the light path of the oblique illumination, preventing stray light from reaching the coaxial illumination, and uses a configuration where the oblique illumination is installed above the coaxial illumination to minimize interference, ensuring that the oblique illumination's light path passes through the cylinder of the coaxial illumination device, reducing the impact of coaxial illumination on oblique illumination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Difficulty of detecting and measuring

If oblique illumination is used for crack detection, then detection sensitivity is improved, but stray light from coaxial illumination reduces measurement precision

Engineering Contradiction:
Improvecrack detection sensitivityVSAvoidcrack length measurement accuracy
Core Design Contradiction:
Difficulty of detecting and measuringVSMeasurement precision

Solution Approach 1:

The illumination system is segmented into distinct oblique and coaxial illumination paths, with the oblique illumination specifically configured for crack detection while the coaxial illumination serves positioning and general inspection. This segmentation allows each illumination type to perform its specialized function without mutual interference, resolving the contradiction between detection sensitivity and measurement precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The oblique illumination is applied locally and specifically to the regions where crack detection is needed, with controlled incident angles optimized for detecting crack reflections. This localized application ensures that oblique illumination enhances crack visibility without allowing stray light to contaminate the measurement field, thereby maintaining both sensitivity and precision.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If both oblique and coaxial illumination are used in the same apparatus, then functional versatility is improved, but mutual interference between illuminations increases device complexity

Engineering Contradiction:
Improveillumination functionalityVSAvoidillumination system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Both oblique and coaxial illumination systems are merged into a single integrated illumination apparatus, sharing common structural elements such as the cylinder housing and mounting mechanisms. This merging provides functional versatility for both crack detection and positioning while minimizing the increase in device complexity through shared components and coordinated design.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The illumination apparatus is designed with multi-functionality, where the same physical structure supports both oblique illumination for crack detection and coaxial illumination for positioning and general inspection. This universal design allows a single device to perform multiple functions without requiring separate independent systems, thereby managing complexity while enhancing versatility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Object-affected harmful factors

If oblique illumination is positioned above coaxial illumination, then interference is reduced, but light path control becomes more difficult

Engineering Contradiction:
Improvestray light interferenceVSAvoidlight path control complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The oblique illumination is positioned in the vertical dimension above the coaxial illumination, creating spatial separation that reduces stray light interference. This dimensional arrangement allows the oblique light to incident at optimized angles for crack detection while passing through or around the coaxial illumination structure, minimizing interference without requiring complex light path control mechanisms.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The cylinder structure serves as an intermediary element that manages the light paths between the oblique and coaxial illumination systems. It provides structural support and optical boundaries that guide the oblique illumination at appropriate angles while allowing the coaxial illumination to maintain its central path, thereby reducing interference without adding complex control mechanisms.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces stray light and enhances the contrast between cracks and the background, improving the detection sensitivity and accuracy of crack detection while maintaining robustness against surface warping and deflection.

Implementation Method 1

a light path control member that limits a light path of second irradiation light emitted from the second light emitting section

Methodology Applied
Scientific EffectLight path limitation:

Implementation Method 2

an oblique illumination, in which a photographic subject is irradiated with light from an oblique direction with respect to the optical axis of the camera

Methodology Applied
Scientific EffectOblique illumination reflection: Reflection

Implementation Method 3

a coaxial vertical illumination or a coaxial illumination, in which a photographic subject is irradiated with light having the same axis as the optical axis of the camera

Methodology Applied
Scientific EffectCoaxial illumination:

Data Source

PatentUS11692947B2Die bonding apparatus and manufacturing method for semiconductor device
Publication Date: 2023.07.04 FASFORD TECH
  • US11692947B2 patent drawing
  • US11692947B2 patent drawing
  • US11692947B2 patent drawing

AI summary

A die bonding apparatus includes a first illumination device for irradiating a die with light along an optical axis of a photographing device, and a second illumination device that is located above the first illumination device and irradiates the die with light having a predefined angle with respect to the optical axis. The second illumination device includes a second light emitting section, and a light path control member that limits a light path of second irradiation light emitted from the second light emitting section. The second illumination device is disposed in such a way that the second irradiation light, the light path of which is limited by the light path control member, passes through the cylinder of the first illumination device, and the top surface of the die is irradiated with the second irradiation light.