Die Bonding Carrier Alignment Using Optical Reference Keys
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Solution Overview
Problem
Existing semiconductor manufacturing technologies face challenges in accurately positioning and attaching semiconductor dies on carriers due to positional deviations during the manufacturing process.
Innovation Solution
A semiconductor manufacturing apparatus is designed with a chuck featuring a chuck reference key at its edge, a carrier contact device with contact position recognition keys, and a bonding head with a bonding head reference key. The apparatus uses cameras to read images of these reference keys, allowing for precise determination and correction of positional deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional positioning methods are used without reference keys, then the device structure is simpler, but the positioning precision and manufacturing precision deteriorate due to positional deviations
Solution Approach 1:
The patent uses reference keys as physical copies or markers of ideal positions. The chuck reference key and bonding head reference key serve as standardized position markers that can be optically detected and used to calculate actual positions, replacing complex mechanical positioning systems with simpler optical measurement and computational correction.
Solution Approach 2:
The patent replaces traditional mechanical positioning systems with an optical measurement system. Instead of relying on precise mechanical alignment and physical guides, the system uses cameras to capture images of reference keys, processes the image data computationally to determine positions, and corrects any deviations through calculation, thereby substituting mechanical complexity with optical and computational methods.
2Measurement precision
If reference keys and image reading systems are added, then the manufacturing precision and positioning accuracy improve, but the device complexity increases
Solution Approach 1:
The reference keys serve as simplified optical copies or markers that represent complex position information in a visually detectable form. The camera captures images of these simple key structures, and the control device processes the image data to extract precise position information, replacing complex direct measurement systems with simpler optical markers and image processing.
Solution Approach 2:
The reference keys act as intermediaries between the physical positioning system and the optical measurement system. Instead of the camera directly measuring complex mechanical positions, it simply captures images of the reference keys, which then serve as intermediaries for the control device to calculate actual positions and deviations, simplifying the overall measurement chain.
3Reliability
If positional deviation correction is implemented, then the reliability and precision of die attachment improve, but the process time and complexity increase
Solution Approach 1:
The patent performs preliminary positioning by placing reference keys at known ideal positions before the actual die attachment process. The system captures images of these reference keys, calculates positional deviations in advance, and determines correction values before the bonding head performs die placement, allowing for efficient real-time correction without adding significant process time.
Solution Approach 2:
The system implements feedback by continuously monitoring the positions of reference keys through image capture, calculating deviations from ideal positions, and using these calculations to correct the positioning of the bonding head and die placement locations. This closed-loop feedback ensures high attachment reliability while maintaining efficient process timing through automated real-time correction.
Data Source
AI summary
A semiconductor manufacturing apparatus according to an embodiment includes a chuck configured to receive a carrier thereon, a carrier contact device configured to contact the carrier on the chuck, and a bonding head configured to transfer a semiconductor die to the carrier and configured to attach the semiconductor die on the carrier. The chuck includes a chuck reference key positioned at an edge portion thereof. The carrier contact device includes a contact position recognition key. The semiconductor manufacturing apparatus also includes a camera configured to obtaining images of the chuck reference key and the contact position recognition key.


