Semiconductor Die Cooling Interface for Thin Direct Fluid Cooling

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Solution Overview

Problem

Semiconductor die packages face challenges in efficiently dissipating heat, leading to potential damage from high temperatures, and require additional components like thermal interface materials, heat spreaders, and lids that increase thickness and manufacturing complexity.

Innovation Solution

Incorporating a cooling interface region with channel regions and pillar structures directly exposed to fluids, promoting turbulent flow and enhancing convective heat transfer without the need for additional thermal components, thereby reducing package thickness and manufacturing resources.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If traditional thermal management components (thermal interface materials, heat spreaders, lids) are used, then heat dissipation is achieved, but package thickness increases and manufacturing complexity increases

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidpackage thickness
Core Design Contradiction:
TemperatureVSLength of stationary object

Solution Approach 1:

The patent extracts and eliminates the need for separate thermal interface materials, heat spreaders, and lid components by integrating their thermal management functions directly into the substrate and interposer structures. The substrate itself is configured with thermal pathways and the interposer provides thermal conduction, removing the requirement for additional thermal management layers and reducing overall package thickness.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges thermal management functions with the structural components of the semiconductor package. The substrate combines mechanical support with thermal conduction pathways, and the interposer integrates both electrical interconnection and thermal management functions. This consolidation of multiple functions into single components eliminates the need for separate thermal management layers, thereby reducing package thickness.

Inventive Principle:
Principle #5Merging (Combining)

2Temperature

If traditional thermal management components are used, then heat dissipation is achieved, but manufacturing complexity and resource consumption increase

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent removes the need for separate thermal interface materials, heat spreaders, and lid components from the manufacturing process. By integrating thermal management functions into the substrate and interposer, the number of discrete components requiring procurement, handling, and assembly is reduced, thereby simplifying the manufacturing process and reducing resource consumption.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent combines thermal management functions with the fabrication of existing structural components (substrate and interposer). This merging allows thermal pathways and conduction features to be created during the same manufacturing processes used to create the structural elements, eliminating the need for separate assembly steps and reducing manufacturing complexity.

Inventive Principle:
Principle #5Merging (Combining)

3Productivity

If cooling interface region with turbulent flow structures is implemented, then convective heat transfer rate increases, but manufacturing precision requirements increase

Engineering Contradiction:
Improveheat transfer rateVSAvoidpillar structure height precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating pillar structures with varying heights at different locations within the cooling interface region. The first pillar structure has a first height and the second pillar structure has a second height, creating localized variations in the flow path. This local variation in structure height promotes turbulent flow and enhances convective heat transfer while the precision requirements are managed through the overall design rather than requiring ultra-precise uniformity across all structures.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach increases heat transfer rates, reduces package thickness for more compact designs, and enhances manufacturing efficiency by eliminating the need for thermal interface materials and heat spreaders.

Implementation Method 1

The array is configured to transfer heat from the integrated circuit die to a fluid using thermal convection

Methodology Applied
Scientific EffectThermal convection: Convection

Implementation Method 2

the one or more connection structures are configured to conduct heat from the integrated circuit die to a substrate below integrated circuit die using thermal conduction

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20240128149A1Cooling interface region for a semiconductor die package
Publication Date: 2024.04.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240128149A1 patent drawing
  • US20240128149A1 patent drawing
  • US20240128149A1 patent drawing

AI summary

Some implementations described herein include systems and techniques for fabricating a semiconductor die package that includes a cooling interface region formed in surface of an integrated circuit die. The cooling interface region, which includes a combination of channel regions and pillar structures, may be directly exposed to a fluid above and/or around the semiconductor die package.