Die Ejector Pneumatic Lift for Thin Film Separation

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Solution Overview

Problem

As the thickness of dies decreases, there is an increasing risk of damage during the separation process from a film using traditional die ejectors, leading to performance reduction and potential bending or cracking of the dies.

Innovation Solution

The die ejector incorporates a supporter with an inner hole, an elevation device, an air conduit guide, and a pressure adjuster device, along with flow guides to control air flow and pressure, ensuring the die is separated vertically and minimizing air pressure deviation to prevent bending and damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If traditional die ejectors are used to separate dies from film, then the separation process is simple, but the risk of die damage increases as die thickness decreases

Engineering Contradiction:
Improveseparation device structureVSAvoiddie integrity during separation
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent uses air pressure control through air conduits to lift and separate the die from the film. By controlling air pressure distribution, the system achieves gentle separation that prevents die damage while maintaining structural simplicity. The air pressure is applied uniformly through multiple conduits to lift the die without causing bending or cracking.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The system dynamically adjusts air pressure parameters during the separation process. By changing pressure levels and distribution patterns, the system adapts to different die thicknesses and fragility levels, ensuring reliable separation without damage. The pressure adjuster device modifies air pressure parameters in real-time based on process requirements.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If air pressure is increased to improve die separation, then separation effectiveness increases, but air pressure deviation causes die bending

Engineering Contradiction:
Improveseparation effectivenessVSAvoiddie flatness during separation
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The air pressure system is divided into multiple independent air conduits distributed across the support surface. Each conduit can be controlled independently or in coordinated groups, allowing segmented pressure application. This segmentation enables uniform pressure distribution that lifts the die evenly without causing localized bending or distortion.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the air pressure system have different pressure characteristics tailored to local requirements. The pressure adjuster device creates localized pressure zones that adapt to the die geometry and film adhesion variations across different areas, ensuring uniform lift and preventing bending while maintaining high separation effectiveness.

Inventive Principle:
Principle #3Local quality

3Productivity

If die thickness is decreased to improve device performance, then device performance improves, but the risk of die damage during separation increases

Engineering Contradiction:
Improvedevice performanceVSAvoiddie resistance to damage
Core Design Contradiction:
ProductivityVSStrength

Solution Approach 1:

The pneumatic lifting system provides contactless or minimal-contact separation for thin dies. By using air pressure instead of mechanical contact, the system eliminates bending forces and mechanical stress that would damage thin dies. The air cushion effect allows even sub-millimeter thick dies to be separated safely while maintaining their structural integrity and performance.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The system prepares the separation environment in advance by establishing air pressure cushions before actual separation occurs. This pre-cushioning protects thin dies from sudden mechanical impacts or bending forces during the separation process. The air pressure is gradually increased to lift the die smoothly, preventing shock-induced damage to fragile thin structures.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces the risk of die damage and performance reduction by maintaining uniform air pressure during separation, ensuring the die is separated without bending or cracking.

Implementation Method 1

a pressure adjuster device configured to induce air flow through the air flow conduit based on inducing a pressure gradient between the air flow conduit and the pressure adjuster device

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS11244840B2Die ejectors and die supplying apparatuses including ihe same
Publication Date: 2022.02.08 SAMSUNG ELECTRONICS CO LTD
  • US11244840B2 patent drawing
  • US11244840B2 patent drawing
  • US11244840B2 patent drawing

AI summary

A die ejector includes a supporter configured to support a film on which a die is attached in a vertical direction, an elevation device in a hole of the supporter and configured to move the film with the die attached thereon in the vertical direction and in relation to the supporter, a driver configured to move the elevation device in the vertical direction, an air conduit guide in an enclosure region at least partially defined by an inner surface of the elevation device and having an inner surface defining an air flow conduit, a pressure adjuster device configured to induce air flow through the air flow conduit based on inducing a pressure gradient between the air flow conduit and the pressure adjuster device, and a flow guide in the air flow conduit and configured to control a flow of air through at least a portion of the air flow conduit.