Fluidic Flow Channel Layout Over a Die for Precise Flow Cell Fabrication

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Solution Overview

Problem

Existing methods for fabricating flow cells are inefficient as they often require complex molding processes and do not allow for precise control over the shape of the fluidic flow channel, which is crucial for applications like DNA sequencing, leading to suboptimal performance and reduced utility.

Innovation Solution

A method involving the placement of a die in a substrate cavity with exposed electrical contacts, forming fluidics fan-out regions, and attaching a lid to create a fluidic flow channel over the active surface of the die, allowing for individualized fabrication and control over the channel shape.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If complex molding processes are used to fabricate flow cells, then the shape of the fluidic flow channel can be controlled, but the fabrication process becomes overly complex and inefficient

Engineering Contradiction:
Improveshape control of fluidic flow channelVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The flow cell fabrication is divided into separate modular steps: placing the die in the substrate cavity, forming under-fill layers, creating fluidics fan-out regions, and attaching the lid. Each step is independent and can be performed separately, eliminating the need for complex integrated molding processes while maintaining precise shape control through individual step optimization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The die is placed in the substrate cavity before forming the fluidic flow channels. This preliminary positioning allows the subsequent fabrication steps to proceed more easily and precisely, as the die serves as a pre-positioned template that guides the formation of the flow channels and fan-out regions without requiring complex real-time molding.

Inventive Principle:
Principle #10Preliminary action

2Productivity

If standardized flow cell fabrication is used, then manufacturing efficiency is improved, but the shape control of fluidic flow channels is reduced

Engineering Contradiction:
Improvefabrication efficiencyVSAvoidshape control of fluidic flow channel
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

By segmenting the fabrication process into discrete, repeatable steps (die placement, under-fill formation, fan-out region creation, lid attachment), the method achieves both high productivity through standardization and precise shape control through modular customization at each step.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The fluidics fan-out regions are formed with specific local geometries tailored to the functional requirements of each application. This local customization of channel shapes and dimensions allows precise control where needed while maintaining overall process efficiency through standardized fabrication techniques.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If individual die fabrication is used, then control over fluidic flow channel formation is improved, but manufacturing time increases

Engineering Contradiction:
Improvecontrol over fluidic flow channel formationVSAvoidfabrication time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

Multiple dies are placed in the substrate cavity simultaneously during the same fabrication cycle. This preliminary batch placement allows individual control over each die's fluidic flow channel formation while maintaining efficient manufacturing timing, as all dies undergo the same sequence of fabrication steps in parallel.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The fabrication processes for multiple individual dies are merged into a single integrated manufacturing cycle. By combining the placement, under-fill formation, fan-out region creation, and lid attachment steps for multiple dies simultaneously, the method achieves individualized control without proportionally increasing total manufacturing time.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11798854B2Fluidic flow channel over active surface of a die
Publication Date: 2023.10.24 ILLUMINA INC
  • US11798854B2 patent drawing
  • US11798854B2 patent drawing
  • US11798854B2 patent drawing

AI summary

Provided herein include various examples of an apparatus, a sensor system and examples of a method for manufacturing aspects of an apparatus, a sensor system. The apparatus may include a die. The apparatus may also include a substrate comprising a cavity. The die may be oriented in a portion of the cavity in the substrate, where the orientation defines a first space in the cavity adjacent to a first edge of the upper surface of the die and a second space in the cavity adjacent to the second edge of the upper surface of the die. The apparatus may further include fluidics fan-out regions comprising a first cured material deposited in the first space and the second space, a surface of the fluidics fan-out regions being contiguous with the upper surface of the die.