Die Pad Concave Structure for Metal Paste Containment

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Solution Overview

Problem

The existing methods for bonding semiconductor chips to die pads using solder or metal pastes face issues such as excessive spreading, overflow, and partial defects, which affect the reliability and yield of semiconductor devices.

Innovation Solution

A die pad with a concave structure is used, where the concave structure is positioned directly under the sides of the semiconductor chip, with varying recess dimensions and corner portions to guide the metal paste and prevent it from flowing onto the upper surface, ensuring proper bonding and reducing defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If metal paste is used for bonding semiconductor chip to die pad, then bonding is achieved, but paste spreading and overflow occur causing bonding defects

Engineering Contradiction:
Improvebonding qualityVSAvoidpaste placement control
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The die pad surface is segmented into a bonding region and a non-bonding region by introducing a concave structure. This segmentation confines the metal paste to the bonding region during the bonding process, preventing paste spreading and overflow onto the non-bonding region, thereby improving paste placement control while maintaining bonding quality

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The die pad surface is given different local qualities through the concave structure: the bonding region has a lower surface level (concave) to accept and contain the metal paste, while the non-bonding region remains at the original surface level. This local differentiation ensures paste confinement to the appropriate area, preventing defects without affecting overall bonding performance

Inventive Principle:
Principle #3Local quality

2Reliability

If conventional flat die pad surface is used, then manufacturing is simple, but paste spreads excessively causing bonding defects

Engineering Contradiction:
Improvebonding defect suppressionVSAvoiddie pad structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A concave (curved downward) structure is introduced into the die pad surface at the bonding region. This curvature creates a natural containment for the metal paste, guiding it to spread only within the bonding region and preventing overflow onto the non-bonding region. The curved structure effectively suppresses bonding defects while adding minimal complexity to the die pad design

Inventive Principle:
Principle #14Spheroidality (Curvature)

Data Source

PatentUS10825756B2Chip attached to a die pad having a concave structure
Publication Date: 2020.11.03 KK TOSHIBA
  • US10825756B2 patent drawing
  • US10825756B2 patent drawing
  • US10825756B2 patent drawing

AI summary

According to one embodiment, a semiconductor device includes a semiconductor chip, and a die pad. The die pad has a first surface. The semiconductor chip is bonded on the first surface using a paste including a metal particle. A concave structure is provided in the first surface. The concave structure is positioned directly under each of a plurality of sides of the semiconductor chip and extends along each of the plurality of sides.