Die Paddle Recesses for Uniform Solder Bond Line Thickness

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Solution Overview

Problem

The challenge of achieving uniform bond line thickness (BLT) in semiconductor devices is exacerbated by die movement during the DACA and reflow processes, leading to non-uniform solder joints and die tilting, which can result in strain concentration, solder voids, and potential die cracking.

Innovation Solution

Incorporating recesses in the die paddle surface to receive and embed spacers, allowing for even distribution of spacers under the die, thereby maintaining uniform solder BLT and preventing die tilting.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If spacers are used to maintain uniform bond line thickness, then solder joint uniformity is improved, but spacer distribution unevenness causes die tilting and strain concentration

Engineering Contradiction:
Improvebond line thickness uniformityVSAvoiddie attachment reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The die paddle surface is segmented into multiple recesses distributed across the bonding area. Each recess individually captures and positions a spacer, ensuring uniform spacer distribution. This segmentation approach prevents spacer clustering and eliminates die tilting while maintaining consistent bond line thickness throughout the large die area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Recesses are pre-formed on the die paddle surface before the soldering process. These recesses preliminarily position the spacers in predetermined locations, ensuring uniform distribution before the actual bonding occurs. This preliminary action prevents spacer migration and ensures reliable die attachment from the start.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If larger die are used to achieve superior RDSON performance, then device performance is improved, but achieving uniform bond line thickness becomes increasingly difficult

Engineering Contradiction:
Improvedevice performanceVSAvoidbond line thickness uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

For large die areas, the surface is divided into multiple recesses strategically distributed across the entire bonding region. This segmentation ensures that spacers are uniformly positioned throughout the large area, maintaining consistent bond line thickness even across extended die dimensions used for high-performance applications.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Recesses are locally distributed across different regions of the die paddle surface based on specific bonding requirements. This local quality approach ensures optimal spacer positioning in each region of the large die, maintaining uniform bond line thickness throughout the entire bonding area regardless of die size.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If molten solder is used to attach the die, then bonding is facilitated, but solder may not be strong enough to prevent die movement during DACA and reflow processes

Engineering Contradiction:
Improvebonding process easeVSAvoiddie position stability
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

Recesses are pre-formed on the die paddle surface to preliminarily position and constrain spacers before the soldering process. This preliminary action ensures that spacers remain in fixed positions during DACA and reflow, preventing die movement while still allowing the molten solder to flow and bond effectively.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Spacers act as intermediary elements between the die paddle and the die. Positioned within recesses, these spacers serve as stable reference points that prevent die movement during soldering, while still allowing the molten solder to flow around them and create strong bonds.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Productivity

If vaporized solvent in the solder moves the die during reflow, then soldering process is completed, but non-uniform bond line thickness and die tilt occur

Engineering Contradiction:
Improvesoldering process completionVSAvoidbond line thickness uniformity
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Recesses are pre-formed to preliminarily position spacers in fixed locations before reflow. This preliminary positioning ensures that even when vaporized solvent causes movement during reflow, the spacers remain constrained within recesses, maintaining uniform bond line thickness throughout the soldering process.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The recesses provide preliminary anti-action against die movement caused by vaporized solvent during reflow. By constraining spacers within recesses before the harmful effect occurs, the design prevents the solvent vapor from displacing spacers and causing non-uniform bonding.

Inventive Principle:
Principle #9Preliminary anti-action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures consistent solder BLT, reduces the risk of solder voids and die cracking, and enhances the reliability of semiconductor devices by evenly distributing spacers, thus improving thermo-mechanical stress resistance.

Implementation Method 1

heating the solder paste or solder preforms applied to the bonding pads of the components and the corresponding contact areas on the substrate to a temperature where the solder transitions from a solid to a liquid state

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 2

the die paddle comprises a plurality of recesses in the upper surface of the die paddle, wherein the plurality of recesses is configured for receiving the plurality of spacers, such that the plurality of spacers is embedded within the plurality of recesses

Methodology Applied
Scientific EffectPhysical containment: Physical Containment

Data Source

PatentEP4645381A1Semiconductor device with controlled bond line thickness using spacers and recesses
Publication Date: 2025.11.05 NEXPERIA BV
  • EP4645381A1 patent drawingFigure 1~2
  • EP4645381A1 patent drawingFigure 3A
  • EP4645381A1 patent drawingFigure 3B

AI summary

A semiconductor device comprising: a die paddle having an upper surface; a solder layer disposed on the upper surface of the die paddle; and a die disposed on the solder layer, such that the solder layer is between the die paddle and the die; wherein the solder layer comprises a plurality of spacers configured to be, during production of the semiconductor device prior to hardening of the solder layer, movable in relation to the die paddle; and wherein the die paddle comprises a plurality of recesses in the upper surface of the die paddle, wherein the plurality of recesses is configured for receiving the plurality of spacers, such that the plurality of spacers is embedded within the plurality of recesses