Automated Die Seal Ring Checking for Mask Design
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Solution Overview
Problem
Conventional mask design procedures often result in human errors related to die seal rings due to manual input of customer demands and inspection, leading to undetected errors until mask manufacturing, which increases workload and reduces customer satisfaction and efficiency.
Innovation Solution
A method and computer system that automatically checks die seal rings by receiving digital layout and tape-out information, performing a checking process, and recording results in an inspection table, which includes issuing alarms for errors, thereby reducing manual mistakes and improving accuracy during the mask design process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual inspection of mask pattern is performed, then inspection flexibility is maintained, but human error increases and inspection reliability decreases
Solution Approach 1:
The patent replaces manual mechanical inspection with automated computer-based checking. The system automatically extracts die seal ring information from layout data, compares it with tape-out information, and generates inspection results without human intervention, thereby eliminating human error while maintaining inspection reliability.
Solution Approach 2:
The inspection system performs self-service by automatically checking die seal ring information against tape-out data and generating its own inspection reports. The system independently completes the entire inspection process without requiring operator intervention, thereby improving reliability while reducing the need for manual inspection.
2Productivity
If manual input of customer demand information is performed, then system simplicity is maintained, but error rate increases and productivity decreases
Solution Approach 1:
The patent applies preliminary action by automatically extracting and preparing die seal ring information from layout data before the mask design process. The system pre-processes the layout information to identify and validate die seal ring parameters, ensuring that all necessary information is ready and accurate before entering the tape-out stage, thereby improving productivity without requiring complex manual input procedures.
Solution Approach 2:
The patent introduces an intermediary automated checking process between layout data generation and mask pattern design. This intermediary system automatically compares layout information with tape-out information, serving as a mediator that ensures data consistency and eliminates errors without requiring direct manual intervention in the design process, thereby improving efficiency while maintaining manageable system complexity.
3Measurement precision
If die seal ring checking is performed manually, then operational flexibility is maintained, but detection accuracy decreases and time consumption increases
Solution Approach 1:
The patent replaces manual visual inspection with automated computer-based detection. The system automatically extracts die seal ring information from layout data, compares it with tape-out information, and generates precise inspection results, thereby improving detection accuracy while reducing inspection time compared to manual methods.
Solution Approach 2:
The patent implements continuous automated checking throughout the mask design process. The system continuously monitors and validates die seal ring information from layout data through tape-out generation, ensuring that any errors are detected immediately without interruption. This continuous automated verification improves detection accuracy while eliminating the time losses associated with manual inspection cycles.
Data Source
AI summary
The invention is directed to a method for checking a die seal ring on a layout. The method comprises steps of receiving a digital database of a layout corresponding to at least a device with a text information corresponding to the layout. Tape-out information corresponding to the layout is received. A checking process is performed according to the digital database of the layout and the tape-out information and, meanwhile, a mask design procedure for designing a mask pattern corresponding to the layout is performed by using the digital database of the layout, the text information and the tape-out information. A result of the checking process is recorded in an inspection table corresponding to the layout.