Semiconductor Die Stacks With Dielectric Cushioning

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor die assembly technologies face challenges in achieving high circuit density, thermal performance, mechanical strength, and cost-effectiveness, particularly in stacked die configurations like the Micropillar Grid Array Package (MPGA), where fragile semiconductor dice require robust mechanical protection and efficient heat dissipation.

Innovation Solution

A semiconductor die assembly method involving a base wafer with thermally conductive elements, where semiconductor dice with conductive through vias are stacked and encapsulated with a dielectric material, providing mechanical protection and enhanced thermal performance, and the base wafer is thinned to reduce package height, enabling higher throughput and reduced costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If semiconductor dice are stacked vertically to increase circuit density, then circuit density is improved, but mechanical strength deteriorates due to fragile dice requiring robust protection

Engineering Contradiction:
Improvecircuit densityVSAvoidmechanical strength
Core Design Contradiction:
Quantity of substanceVSStrength

Solution Approach 1:

The patent applies beforehand cushioning by introducing a dielectric material between the semiconductor dice before final encapsulation. This dielectric material acts as a cushioning layer that provides mechanical protection to the fragile dice while maintaining the vertical stacking configuration for high circuit density.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The dielectric material serves as an intermediary between the semiconductor dice, providing both mechanical support and electrical isolation. This intermediary element enables the fragile dice to be stacked vertically without direct contact, thereby maintaining both high circuit density and mechanical strength.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Strength

If conventional encapsulation methods are used, then mechanical protection is provided, but thermal performance deteriorates due to insufficient heat dissipation

Engineering Contradiction:
Improvemechanical protectionVSAvoidthermal performance
Core Design Contradiction:
StrengthVSTemperature

Solution Approach 1:

The patent applies parameter changes by selecting a dielectric material with specific thermal conductivity properties that differ from conventional encapsulants. The dielectric material is chosen to have improved thermal performance parameters, enabling efficient heat dissipation while maintaining mechanical protection of the stacked dice.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite materials by combining the dielectric material with the encapsulant material. This composite structure provides both mechanical protection from the encapsulant and improved thermal performance from the dielectric material, resolving the contradiction between protection and heat dissipation.

Inventive Principle:
Principle #40Composite materials

3Strength

If base wafer is not thinned, then structural support is maintained, but package height increases reducing manufacturing efficiency

Engineering Contradiction:
Improvestructural supportVSAvoidmanufacturing efficiency
Core Design Contradiction:
StrengthVSProductivity

Solution Approach 1:

The patent applies parameter changes by controlling the thickness parameter of the base wafer. The base wafer is thinned to an optimized thickness that maintains sufficient structural support for the stacked dice while reducing the overall package height. This enables more efficient manufacturing and handling of the semiconductor device.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enhances thermal performance, mechanical strength, and manufacturing efficiency, allowing for higher circuit density and reduced packaging costs while protecting fragile dice and enabling wafer-level testing and handling.

Implementation Method 1

providing a dielectric material between the semiconductor dice

Methodology Applied
Scientific EffectDielectric: Dielectric

Implementation Method 2

base wafer with thermally conductive elements protruding therefrom

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP2737525B1Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication
Publication Date: 2021.07.07 MICRON TECHNOLOGY INC
  • EP2737525B1 patent drawingFigure 1A~1F
  • EP2737525B1 patent drawingFigure 1G~1J
  • EP2737525B1 patent drawingFigure 1K~2D

AI summary

Methods of fabricating multi-die assemblies including a wafer segment having no integrated circuitry thereon and having a plurality of vertically stacked dice thereon electrically interconnected by conductive through vias, resulting multi-die assemblies, and semiconductor devices comprising such multi-die assemblies. The wafer segment may function as a heat sink to enhance heat transfer from the stacked dice in the resulting multi-die assembly. The die stacks are fabricated at the wafer level on a base wafer, from which the wafer segment and die stacks are singulated after at least peripheral encapsulation.