Semiconductor Die Stack-Up With Heat Spreader for Hot Spot Mitigation

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Solution Overview

Problem

Semiconductor dies experience thermal hotspots due to high thermal resistance in silicon substrates, leading to thermal reliability issues, throttling, and reduced performance, particularly during overclocking and extreme testing conditions.

Innovation Solution

Incorporating an integrated heat spreader with a thermal conductivity higher than the semiconductor substrate, bonded via thin bonding layers, to efficiently dissipate heat and mitigate hotspots.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If an integrated heat spreader is added to the semiconductor die, then thermal management is improved and hot spots are mitigated, but device complexity increases

Engineering Contradiction:
Improvethermal managementVSAvoiddevice complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The heat spreader is integrated directly into the semiconductor die structure by bonding it to the back surface of the substrate, merging the thermal management function with the mechanical support function of the substrate. This integration approach improves temperature distribution while minimizing the increase in device complexity by combining multiple functions into a single unified structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs a composite structure consisting of the semiconductor substrate combined with a heat spreader layer having different thermal properties. This composite material approach allows the device to simultaneously maintain electrical functionality and achieve superior thermal management, resolving the contradiction between improved temperature control and increased device complexity.

Inventive Principle:
Principle #40Composite materials

2Reliability

If power is reduced to mitigate hot spots, then thermal reliability is improved, but performance and frequency specifications deteriorate

Engineering Contradiction:
Improvethermal reliabilityVSAvoidfrequency specifications
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent extracts the thermal management function from the power consumption constraint by introducing a dedicated heat spreader component. This allows the semiconductor device to maintain high power consumption for performance while separately addressing thermal reliability through the heat spreader, thus resolving the contradiction between reliability and productivity.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated heat spreader effectively reduces thermal resistance, improving thermal management and maintaining performance under stress conditions, thereby enhancing overclocking capabilities and reducing thermal design power capping.

Implementation Method 1

Incorporating an integrated heat spreader with a thermal conductivity higher than the semiconductor substrate, bonded via thin bonding layers, to efficiently dissipate heat and mitigate hotspots

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250293117A1Semiconductor device stack-up with bulk substrate material to mitigate hot spots
Publication Date: 2025.09.18 INTEL CORP
  • US20250293117A1 patent drawing
  • US20250293117A1 patent drawing
  • US20250293117A1 patent drawing

AI summary

Embodiments disclosed herein include semiconductor dies and methods of forming such dies. In an embodiment, the semiconductor die comprises a semiconductor substrate, an active device layer in the semiconductor substrate, where the active device layer comprises one or more transistors, an interconnect layer over a first surface of the active device layer, a first bonding layer over a surface of the semiconductor substrate, a second bonding layer secured to the first bonding layer, and a heat spreader attached to the second bonding layer.