Integrated Die Stocker Sorting for Clean Semiconductor Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Complex semiconductor fabrication processes face bottlenecks due to intricate processing operations taking longer than simple ones, leading to backlogs and potential contamination risks, as semiconductor dies are intermittently paused for lack of process tools or unexpected issues, necessitating efficient storage and transfer solutions.
Innovation Solution
A die stocker system with integrated sorter functionality and overhead hoist transfer, utilizing different storage cells for various die carriers, such as tray cassettes and boat magazines, to manage and transfer semiconductor dies within a controlled environment, eliminating the need for external sorting systems and minimizing contamination risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If semiconductor dies are intermittently paused for lack of process tools or unexpected issues, then storage and transfer solutions are needed, but contamination risks increase
Solution Approach 1:
The patent combines the storage function (die stocker) with the transfer and sorting function (sorter) into a single integrated system. The sorter is positioned to receive dies directly from the stocker and transfer them to process tools, eliminating the need for separate storage and transfer operations that would expose dies to contamination risks during intermittent pauses.
Solution Approach 2:
The integrated sorter acts as an intermediary between the die stocker and process tools. It receives dies from the stocker, sorts them according to requirements, and transfers them to the appropriate process tools, thereby reducing the time dies spend in intermediate states and minimizing contamination exposure during pauses.
2Adaptability or versatility
If separate storage and sorting systems are used, then functionality is provided, but device complexity increases
Solution Approach 1:
The die stocker is designed with universal compatibility to accommodate multiple types of die carriers (tray cassettes and boat magazines). The integrated sorter shares the same loading/unloading mechanisms and control systems with the stocker, allowing a single system to perform both storage and sorting functions for different carrier types without requiring separate dedicated systems.
Solution Approach 2:
By merging the sorter with the die stocker, the patent eliminates the need for separate storage and sorting systems. The shared infrastructure (mechanical components, control systems, and interface mechanisms) reduces overall device complexity while maintaining the ability to handle various die carrier types through the unified system.
3Productivity
If external sorting systems are used, then sorting functionality is provided, but contamination risks and transfer time increase
Solution Approach 1:
The sorter is integrated directly with the die stocker system, allowing dies to be sorted and transferred within the same controlled environment. This eliminates the need to transport dies to external sorting systems, thereby reducing contamination exposure and transfer time while maintaining efficient sorting functionality.
Solution Approach 2:
The integrated system enables continuous operation where dies are sorted and transferred immediately after being retrieved from storage, without interruption or exposure to external environments. This continuous flow reduces idle time and minimizes contamination risks compared to using separate external sorting systems.
Data Source
AI summary
An apparatus, system and method for storing die carriers and transferring a semiconductor die between the die carriers. A die stocker includes a rack enclosure with an integrated sorting system. The rack enclosure includes storage cells configured to receive and store die carriers having different physical configurations. A transport system transports first and second die carriers between a first plurality of storage cells and a first sorter load port, where the transport system introduces the first and second die carriers to a first sorter. The transport system transports third and fourth die carriers between a second plurality of storage cells and a second sorter load port, where the transport system introduces the third and fourth die carriers to a second sorter. The first and second die carriers have a first physical configuration, and the third and fourth die carriers have a second physical configuration, different than the first physical configuration.