Fluidic Flow Channel Over Die Surface for Precise Flow Cell Coverage
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Solution Overview
Problem
Current methods for fabricating flow cells are inefficient as they often require complex molding processes and do not allow for precise control over the shape of the fluidic flow channel, which can lead to improper coverage of the sensing area and reduced pixel numbers, and are not suitable for applications like sequencing-by-synthesis or cyclic-array sequencing.
Innovation Solution
A method for manufacturing flow cells where each die is fabricated individually, involving placing a die in a substrate cavity with exposed electrical contacts, forming under-fill layers, and creating fluidics fan-out regions and a fluidic flow channel over the active surface of the die by attaching a lid to the substrate, allowing for precise control over the channel shape and size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If complex molding processes are used to fabricate flow cells, then the fluidic flow channel can be formed, but the manufacturing complexity increases and control over channel shape is reduced
Solution Approach 1:
The patent extracts the flow channel formation process from complex molding operations by using a simplified approach: a lid is attached to a substrate with recesses that define the channel geometry. This eliminates the need for complex molding tools while maintaining precise control over channel shape and dimensions.
Solution Approach 2:
The patent introduces a lid as an intermediary component that, when attached to the substrate, defines the flow channel geometry. The lid acts as a mediator that translates the substrate's recesses into a precise flow channel shape without requiring complex molding processes.
2Productivity
If wafer-level fabrication is used to create multiple flow cells, then productivity increases, but control over individual die formation is lost
Solution Approach 1:
The patent segments the fabrication process into two distinct stages: first, multiple dies are fabricated on a wafer in parallel (high productivity); second, individual dies are singulated and assembled with lids to form complete flow cells (individual control). This segmentation allows both high throughput and precise individual customization.
Solution Approach 2:
The patent performs preliminary wafer-level fabrication to create multiple sensor dies simultaneously, then performs individual assembly operations afterward. This preliminary mass fabrication maintains high productivity while subsequent individual assembly steps enable precise control over each flow cell's characteristics.
3Ease of manufacture
If the fluidic flow channel does not properly cover the sensing area, then manufacturing is simpler, but the utility for sequencing applications is reduced
Solution Approach 1:
The patent applies local quality by creating recesses in the substrate at specific locations that correspond to the sensing area. These localized recesses ensure the flow channel properly covers the active sensor regions, optimizing fluid distribution where it is most needed for sequencing applications.
Solution Approach 2:
The patent creates a dynamic fluidic system where the flow channel geometry, defined by the lid and substrate recesses, allows reagents to dynamically access the sensing area. This ensures proper fluid flow patterns that are essential for sequencing reactions while maintaining manufacturing simplicity.
Data Source
AI summary
Provided herein include various examples of an apparatus, a sensor system and examples of a method for manufacturing aspects of an apparatus, a sensor system. The apparatus may include a die. The apparatus may also include a substrate comprising a cavity. The die may be oriented in a portion of the cavity in the substrate, where the orientation defines a first space in the cavity adjacent to a first edge of the upper surface of the die and a second space in the cavity adjacent to the second edge of the upper surface of the die. The apparatus may further include fluidics fan-out regions comprising a first cured material deposited in the first space and the second space, a surface of the fluidics fan-out regions being contiguous with the upper surface of the die.