Dielectric Barrier Discharge Plasma Generator for Air-Gap Reduction

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Solution Overview

Problem

Conventional dielectric barrier discharge (DBD) plasma generators suffer from ineffective discharge due to air gaps between high voltage electrodes and dielectric barriers, leading to reduced plasma generation efficiency and overheating.

Innovation Solution

A resiliently deformable mechanism is introduced to bias the high voltage electrode against the dielectric barrier, reducing or eliminating the air gap and enhancing contact between the two components, thereby improving discharge efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If air gaps are present between high voltage electrodes and dielectric barriers, then assembly is easier, but discharge efficiency deteriorates due to ineffective discharge

Engineering Contradiction:
Improveassembly easeVSAvoiddischarge efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The high voltage electrode is designed with a resilient portion that can dynamically adjust its position to maintain optimal contact with the dielectric barrier. This dynamic capability allows the electrode to compensate for manufacturing tolerances and thermal expansion, ensuring consistent discharge efficiency without requiring extremely tight assembly tolerances.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The resilient portion changes the physical state of the electrode contact interface from rigid non-contact to flexible contact. By introducing elasticity as a parameter change, the system achieves both easy assembly and effective discharge, as the resilient material can deform to fill minor gaps while maintaining electrical contact.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If air gaps are present between high voltage electrodes and dielectric barriers, then manufacturing tolerance is easier to achieve, but plasma generation efficiency deteriorates

Engineering Contradiction:
Improveassembly toleranceVSAvoidplasma generation efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The resilient portion performs self-adjustment to eliminate air gaps without requiring precision assembly. The elastic material automatically deforms to conform to the dielectric barrier surface, making the system self-correcting regarding assembly tolerances while maintaining optimal plasma generation conditions.

Inventive Principle:
Principle #25Self-service

3Productivity

If high voltage electrodes are biased against dielectric barriers to reduce air gaps, then discharge efficiency improves, but risk of overheating increases

Engineering Contradiction:
Improvedischarge efficiencyVSAvoidelectrode temperature
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The resilient portion is designed with specific material properties and geometric characteristics that concentrate contact pressure at optimal locations. This localized quality ensures maximum discharge efficiency at the contact interface while distributing thermal load through the resilient material's thermal conductivity and heat dissipation capabilities.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The mechanism significantly reduces ineffective discharge and enhances plasma generation efficiency by ensuring full contact between the high voltage electrode and dielectric barrier, while also incorporating cooling mechanisms to prevent overheating.

Implementation Method 1

a resiliently deformable mechanism operative to bias the high voltage electrode against the first surface of the dielectric barrier

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

a discharge gap being formed between the second surface of the dielectric barrier and the ground electrode for generating plasma

Methodology Applied
Scientific EffectDielectric barrier discharge: Plasma

Data Source

PatentUS12396084B2Dielectric barrier discharge plasma generator
Publication Date: 2025.08.19 ASMPT SINGAPORE PTE LTD
  • US12396084B2 patent drawing
  • US12396084B2 patent drawing
  • US12396084B2 patent drawing

AI summary

A dielectric barrier discharge plasma generator includes a ground electrode and a high voltage electrode which are configured to form a circuit to receive a power input for plasma generation, a dielectric barrier having a first surface attached to the high voltage electrode, and a second surface facing the ground electrode, and discharge gap being formed between the second surface of the dielectric barrier and the ground electrode for plasma generation, and a resiliently deformable mechanism operative to bias the high voltage electrode against the first surface of the dielectric barrier.