Dielectric Barrier Wire Mesh Plasma Jet for Edge Polymer Removal
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing atmospheric plasma jet devices require high volumes of inert gases to prevent arcing during the removal of edge polymers from substrates, making the process economically impractical due to gas consumption and equipment costs, and are susceptible to damage from arcing.
Innovation Solution
The use of a dielectric barrier and wire mesh in an atmospheric pressure plasma jet device (DWM-APPJ) to generate a plasma at a low inert gas flow rate, reducing the likelihood of arcing and allowing efficient removal of edge polymers without the need for high inert gas flow rates or complex configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional atmospheric plasma jet device is used to remove edge polymers, then the plasma can effectively remove the polymer, but high volumes of inert gas are required to prevent arcing, making the process economically impractical
Solution Approach 1:
A dielectric barrier is introduced as an intermediary between the powered electrode and the plasma to prevent direct contact and reduce arcing. The dielectric material (such as alumina or quartz) acts as a mediator that allows plasma generation while preventing the harmful arc discharge that would otherwise require high inert gas flow rates to suppress
Solution Approach 2:
The invention changes the electrical parameters at the electrode-plasma interface by introducing the dielectric barrier, which modifies the electric field distribution and prevents runaway current growth. This parameter change allows operation at lower inert gas flow rates while maintaining arc prevention
2Productivity
If a conventional atmospheric plasma jet device is used, then polymer removal can be achieved, but the device is susceptible to arcing which can cause substantial damage
Solution Approach 1:
The dielectric barrier is positioned beforehand between the electrode and plasma to cushion against potential arc damage. This protective layer prevents direct arc contact with the electrode, absorbing and distributing the energy that would otherwise cause substantial damage to the device
Solution Approach 2:
The dielectric barrier serves as a protective intermediary that allows the plasma to perform polymer removal while preventing the harmful arc discharge from damaging the electrode. The wire mesh provides an additional intermediary layer for electrical field management
3Reliability
If wire mesh is added to the electrode assembly to reduce arcing, then arc prevention is improved, but the device complexity increases
Solution Approach 1:
A wire mesh structure is used instead of a solid electrode, creating a porous configuration that allows plasma penetration while providing multiple discharge paths. This porous structure naturally distributes the electrical field and reduces arc formation without requiring complex external control systems
Solution Approach 2:
The electrode assembly becomes a composite structure combining the dielectric barrier material (alumina or quartz) with the conductive wire mesh. This composite design integrates multiple functions (electrical conduction, plasma generation, arc prevention) into a single assembly, managing complexity through material integration rather than separate components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The DWM-APPJ device effectively removes edge polymers at a significantly lower inert gas flow rate, minimizing arcing and reducing manufacturing costs by eliminating the need for large inert gas volumes, while maintaining process efficiency and integrating easily into existing substrate manufacturing processes.
Implementation Method 1
applying an rf field to the cavity using the powered electrode to generate the plasma from the at least one inert gas and the at least one process gas
Implementation Method 2
applying an rf field to the cavity using the powered electrode to generate the plasma
Implementation Method 3
a first dielectric layer... and a first wire mesh disposed between the powered electrode and the first dielectric layer. The first wire mesh being shielded from the plasma by the first dielectric layer
Data Source
AI summary
An apparatus generating a plasma for removing an edge polymer from a substrate is disclosed. The embodiment includes a powered electrode assembly, including a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The embodiment also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated, the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, the cavity having an outlet at one end for providing the plasma to remove the edge polymer.