Dielectric Composition Hydrogen Resistance
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Solution Overview
Problem
Dielectric thin films experience reliability issues due to deterioration in insulativity under hydrogen atmospheres, affecting the reliability of electronic circuit boards.
Innovation Solution
A dielectric composition with a composition formula (Sr1-xCax)m(Ti1-yHfy)O3-δNδ is used, where 0.15<x≤0.90, 0<y≤0.15, and 0.90≤m≤1.15, to form a dielectric thin film with improved hydrogen resistance, which is integrated into electronic circuit boards.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional dielectric thin film is used, then the manufacturing cost is low and it can be formed on substrates with low heat resistance, but the insulativity deteriorates under hydrogen atmosphere leading to poor reliability
Solution Approach 1:
The patent modifies the chemical composition parameters of the dielectric thin film by incorporating nitrogen at specific concentrations (0.01 ≤ δ ≤ 0.06) and adjusting the stoichiometric ratio (0.90 ≤ m ≤ 1.15), which fundamentally changes the material's resistance to hydrogen-induced deterioration while maintaining manufacturability through established deposition techniques
Solution Approach 2:
The patent creates a composite dielectric material system combining Sr1-xCax(Ti1-yHfy)O3-δ with nitrogen incorporation, where the multi-element composition works synergistically to provide both the desired dielectric properties and enhanced hydrogen resistance without requiring completely new manufacturing processes
2Reliability
If nitrogen is incorporated into the perovskite structure, then dielectric properties are maintained on low heat resistance substrates, but insulativity still deteriorates under hydrogen atmosphere
Solution Approach 1:
The patent establishes specific parameter ranges for nitrogen content (0.01 ≤ δ ≤ 0.06) and stoichiometric ratio (0.90 ≤ m ≤ 1.15) that optimize hydrogen resistance while remaining compatible with existing manufacturing tolerances and deposition processes
Solution Approach 2:
The patent introduces nitrogen at specific lattice positions within the perovskite structure (occupying oxygen sites), creating localized structural modifications that provide hydrogen resistance without compromising the overall dielectric functionality or requiring precise control throughout the entire material structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The dielectric composition significantly enhances the reliability of electronic circuit boards by maintaining insulation resistance under hydrogen atmospheres, preventing deterioration and ensuring better hydrogen resistance.
Implementation Method 1
the dielectric thin film has a perovskite structure and contains nitrogen in the perovskite structure
Implementation Method 2
maintaining a good dielectric property due to the presence of nitrogen
Data Source
AI summary
To provide a dielectric composition having excellent reliability. The dielectric composition contains a main component represented by a composition formula (Sr1-xCax)m(Ti1-yHfy)O3-δNδ, in which 0.15<x≤0.90, 0<y≤0.15, 0.90≤m≤1.15, 0<δ≤0.05 are satisfied.


