Non-Contact Dielectric Constant Measurement Using Electric Field Attenuation
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Solution Overview
Problem
Existing methods for measuring the dielectric constant of sheet- or film-shaped dielectric materials struggle with high spatial resolution and non-contact measurement, particularly during high-speed manufacturing processes, as they often require contact with the sample, leading to destructive inspection or risk of sample flutter.
Innovation Solution
A measurement device comprising an electric field generator, a non-contact electric field detector, and a processor that derives a calibration curve to calculate the dielectric constant from detected electric field intensity and thickness, allowing for non-contact, high spatial resolution measurements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If contact measurement method is used, then measurement precision is improved, but sample damage occurs and destructive inspection results
Solution Approach 1:
The patent replaces the mechanical contact measurement system with an optical measurement system. Specifically, it uses a laser beam and photodetector to measure surface displacement and strain without physical contact with the sample, thereby achieving high spatial resolution while avoiding sample damage
Solution Approach 2:
The patent introduces an optical field as an intermediary between the measurement device and the sample. The laser beam serves as the intermediary that interacts with the sample's surface displacement and strain fields, enabling non-contact measurement with high spatial resolution
2Measurement precision
If contact measurement method is used, then measurement precision is improved, but measurement speed is reduced due to destructive inspection
Solution Approach 1:
The patent replaces the mechanical contact measurement system with an optical measurement system using laser beams and photodetectors, enabling non-contact measurement that does not require destructive inspection, thereby significantly increasing measurement speed and productivity
Solution Approach 2:
The patent enables continuous measurement by using non-contact optical methods that do not damage the sample, allowing for repeated and continuous measurements to be performed without interruption, thereby improving measurement speed and productivity
3Object-affected harmful factors
If non-contact measurement method is used, then sample damage is avoided, but measurement precision deteriorates due to distance requirements
Solution Approach 1:
The patent employs periodic action by using oscillating laser beams and modulated optical signals to enhance the sensitivity and precision of non-contact measurements, allowing for high spatial resolution to be achieved without requiring extremely close proximity to the sample
Solution Approach 2:
The patent utilizes mechanical vibration principles by detecting surface displacement and strain through optical interference methods, where the laser beam detects minute surface movements caused by vibrations or deformations, achieving high spatial resolution without contact
4Measurement precision
If probe distance is reduced to 30 nm or less, then measurement precision is improved, but sample flutter causes probe contact
Solution Approach 1:
The patent replaces the mechanical probe system with an optical detection system that uses laser beams and photodetectors to measure surface characteristics from a distance, eliminating the risk of probe contact with fluttering samples while maintaining high spatial resolution
Solution Approach 2:
The patent addresses sample flutter by using optical interference methods that can detect surface displacement and strain even when the sample is moving or vibrating, converting the flutter into measurable optical signals rather than contact events
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables stable, low-disturbance measurement of dielectric constants with higher spatial resolution than metal antenna methods, suitable for in-line measurement during high-speed manufacturing without sample contact, improving productivity and reducing measurement errors.
Implementation Method 1
an electric field generator configured to generate an alternating current electric field
Implementation Method 2
an electric field detector disposed to face the electric field generator at a distance from the electric field generator and configured to detect the alternating current electric field generated by the electric field generator
Implementation Method 3
The electric field detector is configured to detect an intensity of the alternating current electric field attenuated by the measurement target
Data Source
AI summary
A measurement device includes an electric field generator, an electric field detector, a thickness gauge, and a processor. The electric field generator generates an alternating current electric field. The electric field detector detects the alternating current electric field generated by the electric field generator. The thickness gauge measures a thickness of a measurement target in a non-contact manner. The processor derives a calibration curve representing a relationship between a specific dielectric constant and an intensity of an alternating current electric field. The measurement target is insertable between the electric field generator and the electric field detector. The electric field detector detects an intensity of the alternating current electric field attenuated by the measurement target. The processor calculates a specific dielectric constant of the measurement target based on the detected intensity of the alternating current electric field, the measured thickness, and the derived calibration curve.