Dielectric-Free Resonator Chamber for High-Voltage RF Electrodes

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing RF LINAC designs face the risk of dielectric breakdown due to high RF voltage amplitudes near RF electrodes and resonator coils located under vacuum, leading to potential failure in insulator surfaces supporting high voltage components.

Innovation Solution

A resonator chamber is placed under vacuum with a resonator coil directly connected to RF electrodes, eliminating the need for insulator surfaces in the high voltage region, thus preventing dielectric breakdown and enhancing reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If insulator surfaces are used to support RF electrodes and resonator coils under vacuum, then mechanical support and electrical isolation are provided, but dielectric breakdown may occur due to high RF voltage amplitudes

Engineering Contradiction:
ImprovereliabilityVSAvoiddielectric breakdown
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent removes insulator surfaces from the vacuum chamber environment, extracting the source of dielectric breakdown. Instead of using insulators that are susceptible to high voltage breakdown, the design employs conductive supports that are grounded, eliminating the dielectric breakdown risk while maintaining mechanical support and electrical isolation functions.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the electrical parameter of the support structure from insulating (high electrical resistance) to conductive (low electrical resistance). By using grounded conductive supports instead of insulators, the system operates in a parameter regime that avoids dielectric breakdown while still providing the necessary mechanical support and electrical isolation through the grounded configuration.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If resonator coil is placed under vacuum adjacent to RF electrodes, then direct connection is enabled, but dielectric breakdown risk increases due to high voltage operation

Engineering Contradiction:
Improvedirect connectionVSAvoiddielectric breakdown
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the insulator material from the high voltage region, removing the component that is vulnerable to dielectric breakdown. The resonator coil is directly connected to RF electrodes through conductive supports that are grounded, enabling direct connection without introducing insulator surfaces that could break down under high voltage stress.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces grounded conductive supports as intermediaries between the resonator coil and RF electrodes. These conductive intermediaries provide the necessary mechanical support and electrical connection while being grounded to prevent charge accumulation and dielectric breakdown, serving as a safe mediator in the high voltage environment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for higher voltage operation without insulator-related failures, ensuring stable operation and preventing dielectric breakdown, thereby improving the reliability and efficiency of high energy ion implantation systems.

Implementation Method 1

As RF LINAC employs a high frequency drive signal to generate the high voltage at one or more electrodes in a given stage of the linear accelerator, via a resonator coil

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a resonator chamber, arranged in a vacuum enclosure

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS12185451B2Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber
Publication Date: 2024.12.31 APPLIED MATERIALS INC
  • US12185451B2 patent drawing
  • US12185451B2 patent drawing
  • US12185451B2 patent drawing

AI summary

An apparatus may include a resonator chamber, arranged in a vacuum enclosure; an RF electrode assembly, arranged within the vacuum enclosure; and a resonator coil, disposed within the resonator chamber, the resonator coil having a high voltage end, directly connected to at least one RF electrode of the RF electrode assembly.