Dielectric Transmittance Layering for Metal Trace Inspection

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Solution Overview

Problem

As electronic devices become smaller and more components are integrated, the design and quality of metal traces between components significantly affect the reliability of these devices. Current methods struggle to efficiently inspect these traces for defects, leading to increased inspection time and reduced reliability.

Innovation Solution

The electronic device incorporates a connector with a specific layered structure, including a conductive layer sandwiched between two dielectric layers with different transmittances for light. This structure enhances the definition of inspection images, allowing for more effective defect detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional inspection methods are used for metal traces in integrated electronic devices, then inspection coverage can be achieved, but inspection time increases and definition of inspection images deteriorates

Engineering Contradiction:
Improvedefinition of inspection imagesVSAvoidinspection time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The inspection system divides the inspection process into multiple wavelength channels, with different wavelengths inspecting different depth layers of the connector. This segmentation allows simultaneous multi-layer inspection, improving image definition at each layer while reducing total inspection time through parallel processing

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces wavelength as an additional dimension for inspection, transitioning from single-wavelength 2D imaging to multi-wavelength 3D imaging. By utilizing the wavelength dimension, the system achieves enhanced depth resolution and image definition without increasing inspection time proportionally

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If more components are integrated into smaller electronic devices, then device functionality improves, but difficulty of detecting and measuring metal trace defects increases

Engineering Contradiction:
Improvecomponent integration densityVSAvoiddefect detection difficulty
Core Design Contradiction:
Adaptability or versatilityVSDifficulty of detecting and measuring

Solution Approach 1:

The inspection system applies local quality by using wavelength-specific transmittance characteristics of dielectric layers to optimize inspection for specific regions and depths. Each wavelength channel provides enhanced contrast for defects at particular locations, making defect detection easier in densely integrated structures

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

By adding wavelength as an inspection dimension, the system creates virtual 3D images that separate overlapping metal traces from different layers. This dimensional addition resolves the difficulty of detecting defects in highly integrated configurations where traces are densely packed

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Measurement precision

If multi-layer dielectric structure with different transmittances is used, then image definition improves, but device complexity increases

Engineering Contradiction:
Improveinspection image definitionVSAvoidconnector structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The dielectric layers serve multiple functions: they provide electrical insulation between conductive layers and simultaneously act as optical filters with specific transmittance characteristics for different wavelengths. This multi-functionality reduces the need for separate inspection-optimized structures, maintaining manufacturing simplicity while improving image definition

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The enhanced inspection image definition reduces inspection time and improves the ability to detect defects, thereby increasing the reliability of electronic devices with complex metal trace configurations.

Implementation Method 1

the first dielectric layer has a first transmittance for a light, the second dielectric layer has a second transmittance for the light, and the first transmittance is different from the second transmittance

Methodology Applied
Scientific EffectLight transmittance: Absorption (EM radiation)

Data Source

PatentUS12237176B2Electronic device and manufacturing method and inspection method thereof using transmittance of dielectric
Publication Date: 2025.02.25 INNOLUX CORP
  • US12237176B2 patent drawing
  • US12237176B2 patent drawing
  • US12237176B2 patent drawing

AI summary

An electronic device includes a conductive layer, a first dielectric layer, and a second dielectric layer, in which the second dielectric layer is disposed on the first dielectric layer, the conductive layer is disposed between the first dielectric layer and the second dielectric layer, the first dielectric layer has a first transmittance for a light, the second dielectric layer has a second transmittance for the light, and the first transmittance is different from the second transmittance.