Dielectric Waveguide for High-Speed Chiplet Interconnects

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Solution Overview

Problem

High-speed links in the range of several hundred gigahertz to terahertz between circuit blocks or different dies in computing systems face challenges due to high metal losses and difficulties in controlling the thickness of interlayer dielectric materials in legacy waveguides.

Innovation Solution

The implementation of an on-chip waveguide network built on a semiconductor substrate with a low-loss high resistivity substrate, such as glass or silicon, which includes a waveguide material with a low loss tangent and metal coating or cladding, allowing for efficient high-speed data transfer between chips or circuit blocks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If metal interconnects are used for high-speed links at several hundred GHz to THz frequencies, then electrical connection is achieved, but metal losses become relatively high

Engineering Contradiction:
Improvemetal lossesVSAvoidsignal transmission quality
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent replaces metal interconnects with dielectric waveguides for signal transmission. The waveguide uses dielectric materials to guide electromagnetic waves instead of relying on metal conductors, thereby eliminating the primary source of metal losses at high frequencies while maintaining reliable signal transmission between chiplets.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the transmission medium from conductive metal to dielectric material, fundamentally altering the physical parameter of the transmission path. This parameter change enables lower loss propagation at THz frequencies by utilizing the dielectric properties of the waveguide material rather than the resistive properties of metal interconnects.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If legacy organic or low-temperature co-fired ceramic waveguides are used, then waveguide functionality is achieved, but thickness control and manufacturing precision are difficult

Engineering Contradiction:
Improvethickness controlVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent employs a composite structure consisting of a substrate, waveguide material layer, and metal coating or cladding. This composite material approach enables precise thickness control of the waveguide while maintaining manufacturability, as each layer can be independently optimized and fabricated using standard semiconductor processing techniques.

Inventive Principle:
Principle #40Composite materials

3Reliability

If on-chip waveguide network with low-loss substrate is implemented, then electrical performance is increased, but device complexity increases

Engineering Contradiction:
Improveelectrical performanceVSAvoidwaveguide structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The substrate serves multiple functions: it provides mechanical support, guides electromagnetic waves, and offers a platform for integrating chiplets. The waveguide structure is designed to be multi-functional, enabling both signal transmission and potential thermal management, thereby achieving high electrical performance without proportionally increasing overall device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution provides better process tolerance, reduced thickness, increased electrical performance, and a more compact form factor, enabling high-bandwidth communication with lower losses compared to legacy organic or low-temperature co-fired ceramic waveguides.

Implementation Method 1

a waveguide launcher electromagnetically and physically coupled with the waveguide material, wherein the waveguide launcher is exposed at a side of the dielectric substrate

Methodology Applied
Scientific EffectElectromagnetic radiation: Electromagnetic Induction

Implementation Method 2

a first chiplet of the plurality of chiplets to communicate with a second chiplet of the plurality of chiplets by a radio frequency (RF) signal that propagates through the on-chip dielectric waveguide

Methodology Applied
Scientific EffectElectromagnetic wave propagation: Waveguide (optics)

Data Source

PatentUS10992017B2Semiconductor package comprising chiplets disposed on a substrate which are electromagnetically coupled by dielectric waveguides and a computing networks formed therefrom
Publication Date: 2021.04.27 INTEL CORP
  • US10992017B2 patent drawing
  • US10992017B2 patent drawing
  • US10992017B2 patent drawing

AI summary

Embodiments may relate to a dielectric waveguide that includes a substrate and a waveguide material disposed within the substrate. The dielectric waveguide may further include a waveguide launcher electromagnetically and physically coupled with the waveguide material, wherein the waveguide launcher is exposed at a side of the dielectric substrate. Other embodiments may be described or claimed.