Dielectric Waveguides in Semiconductor Packages

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Solution Overview

Problem

The increasing functionality and density of CMOS circuitry in semiconductor devices pose challenges in providing sufficient interconnects, leading to limitations in data transfer rates and signal integrity due to physical constraints and traditional transmission line losses.

Innovation Solution

The implementation of dielectric waveguides within semiconductor packages or interposer layers to facilitate radio frequency communication between semiconductor dies, utilizing millimeter wave frequencies to enhance data transfer rates and reduce signal loss and cross-talk.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the number of bumps is increased to provide sufficient interconnects, then the data transfer capability is improved, but the physical size of the die increases

Engineering Contradiction:
Improvedata transfer capabilityVSAvoidphysical size of the die
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The patent replaces traditional mechanical/electrical interconnects (bumps and traces) with electromagnetic waveguides that transmit signals through the substrate. This substitution allows multiple data channels to be transmitted through the same physical space, dramatically increasing data transfer capability without proportionally increasing the number of physical interconnect points or die size.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention transitions from two-dimensional surface interconnects to three-dimensional volumetric waveguide transmission by embedding waveguides within the substrate thickness. This enables signals to travel through the bulk material rather than being constrained to surface traces, allowing higher data rates and more interconnects without increasing the die footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If the physical pitch of bumps is reduced to increase interconnect density, then the data transfer capability is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveinterconnect densityVSAvoidbump pitch precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical bump-and-trace interconnect system with electromagnetic waveguide transmission. This eliminates the need for precisely positioned bumps and their associated manufacturing tolerances, as waveguides can be formed using standard semiconductor fabrication processes without requiring the same level of mechanical precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the fundamental operating parameters from low-frequency electrical signals through conductive interconnects to high-frequency electromagnetic waves through dielectric waveguides. This parameter change enables higher data rates and denser interconnects while relaxing mechanical precision requirements, as waveguide formation relies on dielectric patterning rather than precise metal bump placement.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If the data rate across an interconnect is increased to improve throughput, then the productivity is improved, but signal integrity deteriorates

Engineering Contradiction:
Improvedata rateVSAvoidsignal integrity
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent replaces traditional electrical interconnects with electromagnetic waveguides optimized for high-frequency operation. Waveguides provide superior signal integrity at high data rates by confining electromagnetic fields within the substrate, reducing radiation losses, crosstalk, and interference that plague traditional trace-based interconnects at high frequencies.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The dielectric substrate acts as an intermediary medium that guides electromagnetic waves between bumps. This intermediary waveguide structure protects signals from external interference and prevents crosstalk between adjacent interconnects, maintaining signal integrity even at increased data rates where traditional direct trace connections would fail.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Device complexity

If traditional transmission lines are used for signal transmission, then the device complexity is kept simple, but signal loss and cross-talk increase

Engineering Contradiction:
Improvetransmission structure simplicityVSAvoidsignal loss and cross-talk
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent replaces simple surface transmission lines with three-dimensional dielectric waveguides embedded in the substrate. While this adds some structural complexity, it dramatically reduces signal loss and crosstalk by confining electromagnetic fields within the waveguide structure, preventing energy radiation and interference with adjacent signals that plague traditional transmission lines.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reliable high-data-rate transmission with improved signal integrity and increased bandwidth, overcoming physical and practical limitations of traditional interconnects by using waveguides optimized for millimeter wave frequencies.

Implementation Method 1

a dielectric member having at least one waveguide formed therein, where the waveguide communicably couples the first RF transceiver with the second RF transceiver

Methodology Applied
Scientific EffectWaveguide: Waveguide

Data Source

PatentUS11037892B2Substrate dielectric waveguides in semiconductor packages
Publication Date: 2021.06.15 INTEL CORP
  • US11037892B2 patent drawing
  • US11037892B2 patent drawing
  • US11037892B2 patent drawing

AI summary

Waveguides disposed in either an interposer layer or directly in the semiconductor package substrate may be used to transfer signals between semiconductor dies coupled to the semiconductor package. For example, inter-semiconductor die communications using mm-wave carrier signals launched into waveguides specifically tuned to optimize transmission parameters of such signals. The use of such high frequencies beneficially provides for reliable transmission of modulated high data rate signals with lower losses than conductive traces and less cross-talk. The use of mm-wave waveguides provides higher data transfer rates per bump for bump-limited dies as well as beneficially providing improved signal integrity even at such higher data transfer rates. Such mm-wave waveguides may be built directly into semiconductor package layers or may be incorporated into one or more interposed layers that are physically and communicably coupled between the semiconductor dies and the semiconductor package substrate.