Dielectric Wire Mesh Plasma Jet for Fluorinated Polymer Removal
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Solution Overview
Problem
Current methods for removing fluorinated polymers from substrates, such as those used in semiconductor manufacturing, are inefficient and costly, particularly due to the high volume of inert gases required to prevent arcing in atmospheric plasma jet devices, which can lead to equipment damage and increased operational expenses.
Innovation Solution
The use of a Dielectric Wire Mesh Atmospheric Pressure Plasma Jet (DWM-APPJ) device, which incorporates a dielectric barrier and a wire mesh between electrodes to generate a plasma at a lower inert gas flow rate, reducing the likelihood of arcing and minimizing substrate damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If atmospheric plasma jet (APPJ) is used to remove fluorinated polymer, then polymer removal effectiveness is improved, but arcing occurs which can damage equipment and substrate
Solution Approach 1:
A dielectric barrier is introduced as an intermediary layer between the powered electrode and the plasma. This dielectric barrier prevents direct contact between the high-voltage electrode and the plasma, thereby eliminating arcing while maintaining polymer removal effectiveness. The dielectric material acts as a mediator that allows plasma generation without the harmful electrical discharge.
Solution Approach 2:
The invention changes the electrical parameters by using a dielectric barrier to modify the electric field distribution. This parameter change allows the plasma to be generated at lower voltages and prevents the formation of high-current arcs, thereby reducing equipment damage while maintaining cleaning effectiveness.
2Reliability
If high volume of inert gas is used in APPJ to prevent arcing, then arcing is reduced, but operational cost and equipment complexity increase
Solution Approach 1:
The dielectric barrier serves as a physical intermediary that replaces the need for high volumes of inert gas. Instead of using large amounts of gas to suppress arcing, the dielectric material provides a solid barrier that prevents electrical discharge, thereby dramatically reducing inert gas consumption and associated costs.
Solution Approach 2:
The invention replaces the mechanical/gas-based arcing suppression method with a solid dielectric barrier. Instead of relying on high gas flow rates to prevent arcing, the dielectric material provides a more efficient and cost-effective solution that eliminates the need for excessive inert gas consumption.
3Reliability
If O2 plasma under vacuum conditions is used to remove fluorinated polymer, then both photoresist and sidewall polymers are removed, but expensive plasma processing equipment and additional processing time are required
Solution Approach 1:
The dielectric barrier APPJ system is designed to be self-contained and can operate at atmospheric pressure without requiring vacuum equipment. The dielectric barrier enables the plasma to function effectively in ambient conditions, eliminating the need for expensive vacuum systems and additional processing stations, thereby reducing both equipment cost and processing time.
Solution Approach 2:
The invention changes the pressure parameter from vacuum to atmospheric pressure operation. By using a dielectric barrier to enable stable plasma generation at atmospheric pressure, the system eliminates the need for vacuum equipment while maintaining effective polymer removal capabilities, thereby simplifying the overall process and reducing costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The DWM-APPJ device effectively removes fluorinated polymers at a significantly lower inert gas flow rate than traditional methods, reducing costs and equipment complexity while maintaining process efficiency and preventing arcing, thus enhancing manufacturing yield and reducing substrate contamination.
Implementation Method 1
The use of a Dielectric Wire Mesh Atmospheric Pressure Plasma Jet (DWM-APPJ) device, which incorporates a dielectric barrier and a wire mesh between electrodes to generate a plasma
Implementation Method 2
Dielectric Wire Mesh Atmospheric Pressure Plasma Jet (DWM-APPJ) device, which incorporates a dielectric barrier and a wire mesh between electrodes to generate a plasma
Implementation Method 3
the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity
Data Source
AI summary
An apparatus generating a plasma for removing fluorinated polymer from a substrate is provided. The apparatus includes a powered electrode assembly, which includes a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The apparatus also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated. The first wire mesh is shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, which has an outlet at one end for providing the plasma to remove the fluorinated polymer.