Differential compliant displacement reducer with output in same direction or reverse direction of input
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Solution Overview
Problem
Current nanometer positioning technologies, such as those using piezoelectric stack actuators with displacement amplification mechanisms, struggle to achieve high enough precision for advanced applications in semiconductor technology, spaceflight, and bioengineering, as they typically only reach motion precision in the dozens or hundreds of nanometers.
Innovation Solution
A modular differential compliant displacement reducer is introduced, comprising a forward motion module and a reverse motion module with symmetrical structures, such as double-lever and half-bridge modules, connected through compliant hinges, which allows for differential superposition of displacement, enhancing the displacement reduction ratio and precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a displacement amplification mechanism (such as bridge type or lever type) is used with piezoelectric stack actuator, then the displacement is amplified, but the motion precision deteriorates to dozens or hundreds of nanometers
Solution Approach 1:
The displacement reducer is divided into multiple independent modules (first displacement reduction module, second displacement reduction module, etc.), each contributing to the overall displacement reduction. This segmentation allows each module to be optimized for precision while collectively achieving large displacement reduction ratio.
Solution Approach 2:
Instead of amplifying displacement as in traditional mechanisms, this invention inverts the approach by using displacement reduction modules that decrease the displacement from the actuator. The output displacement is deliberately reduced to achieve nanometer-level or sub-nanometer precision, reversing the conventional displacement amplification paradigm.
2Device complexity
If traditional displacement amplification mechanisms are used, then the structure is simple, but the positioning precision deteriorates and cannot meet high motion precision requirements
Solution Approach 1:
The system is segmented into multiple standardized displacement reduction modules that can be independently manufactured and assembled. Each module has a relatively simple structure, but their combination achieves the required high positioning precision through cumulative effect and modular coordination.
Solution Approach 2:
The displacement reduction modules are designed with universal interfaces and standardized structures, allowing them to be used in various positioning systems. The modules can be configured in different arrangements (series, parallel, or combinations) to achieve different displacement reduction ratios while maintaining consistent precision characteristics.
3Ease of operation
If piezoelectric stack actuator with displacement amplification is used, then the actuation is direct, but the motion precision deteriorates to only nanometer or sub-nanometer level insufficient for advanced applications
Solution Approach 1:
Multiple displacement reduction modules serve as intermediaries between the piezoelectric stack actuator and the final output. These modules progressively reduce the displacement while maintaining the direct actuation advantage, transforming the actuator's micrometer-level displacement into nanometer or sub-nanometer precision output through staged reduction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly improves motion precision and resolution, enabling large-range and ultrahigh-precision motion positioning, capable of being matched with macro-motion platforms, and can achieve displacement reduction by several orders of magnitude beyond traditional systems.
Implementation Method 1
A piezoelectric stack actuator is generally adopted to directly drive and position
Implementation Method 2
the output end of the forward motion module and the input end of the reverse motion module are compliantly connected through a compliant hinge
Data Source
AI summary
The invention discloses a modular differential compliant displacement reducer with output in same direction or reverse direction of input. The modular differential compliant displacement reducer includes a forward motion module, a reverse motion module and an actuator, and two ends of the forward motion module are respectively connected to one end of the reverse motion module. Differential superposition of displacement is achieved through combination of the forward motion module and the reverse motion module, a large displacement reduction ratio can be obtained, and therefore the resolution ratio and precision of motion are greatly improved. The reducer can be matched with a macro-motion platform, and large-range and ultrahigh-precision motion positioning is achieved.