Differential Micromachined Ultrasonic Transducer Noise Cancellation

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Solution Overview

Problem

Capacitive micromachined ultrasonic transducers (CMUTs) are susceptible to noise from supply voltage lines, bias voltage lines, and ground lines, leading to signal degradation and reduced image quality in ultrasound devices due to their single-ended signaling techniques.

Innovation Solution

Implementing differential micromachined ultrasonic transducer (MUT) technology with differential signaling techniques, where multiple MUTs are biased with different voltages, allowing noise cancellation and reduced signal processing distortion, thereby enhancing image fidelity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If single-ended signaling techniques are used in CMUTs, then device complexity is reduced, but noise from supply voltage lines, bias voltage lines, and ground lines increases leading to signal degradation

Engineering Contradiction:
Improvesignaling technique complexityVSAvoidnoise interference
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The patent applies differential signaling which inverts the conventional single-ended approach by using two complementary signal paths with opposite polarities. This inversion allows noise cancellation through subtraction of the two signals, effectively eliminating common-mode noise from supply voltage lines, bias voltage lines, and ground lines while maintaining robust operation

Inventive Principle:
Principle #13The other way round (Inversion)

2Reliability

If differential MUT configuration is implemented, then noise cancellation and signal quality improve, but device complexity increases due to multiple MUTs and differential circuitry

Engineering Contradiction:
Improvesignal qualityVSAvoidtransducer element complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple MUT elements into a single integrated differential MUT element structure where first and second MUTs are combined with shared biasing circuitry and integrated readout electronics. This merging approach achieves noise cancellation and improved signal quality while reducing overall device complexity through consolidation of functions

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The differential MUT element structure serves multiple functions simultaneously: it acts as both a transmit and receive element, provides noise cancellation, enables differential signaling for improved immunity to interference, and integrates multiple sensing functions within a single element, thereby improving reliability without proportionally increasing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The differential MUT configuration reduces noise interference and improves the quality of ultrasound data and images by canceling out common noise sources and minimizing ground bounce, resulting in more robust and high-fidelity imaging.

Implementation Method 1

Capacitive micromachined ultrasonic transducers (CMUTs) are known devices that include a membrane above a micromachined cavity. The membrane may be used to transduce an acoustic signal into an electric signal, or vice versa.

Methodology Applied
Scientific EffectCapacitive micromachined ultrasonic transducer (CMUT) effect: Capacitance

Data Source

PatentEP3641954B1Differential ultrasonic transducer element for ultrasound devices
Publication Date: 2024.04.10 BFLY OPERATIONS INC
  • EP3641954B1 patent drawingFigure 1A
  • EP3641954B1 patent drawingFigure 1B
  • EP3641954B1 patent drawingFigure 2A~2B

AI summary

Aspects of the technology described herein relate to ultrasound circuits that employ a differential ultrasonic transducer element, such as a differential micromachined ultrasonic transducer (MUT) element. The differential ultrasonic transducer element may be coupled to an integrated circuit that is configured to operate the differential ultrasonic transducer element in one or more modes of operation, such as a differential receive mode, a differential transmit mode, a single-ended receive mode, and a single-ended transmit mode.