Differential pressure measuring device and differential pressure measurement method
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Solution Overview
Problem
Existing differential pressure measurement methods in clean rooms fail to accurately measure small differential pressures, particularly in the order of 0.1 Pa, due to the influence of air currents and dynamic pressure on pressure readings.
Innovation Solution
A differential pressure measuring device with fixed positional relationship between pipes and a cup forming a pseudo under-floor space to reduce dynamic pressure effects, using a cup to stabilize the under-floor pressure measurement and fix the distance between pipe ends, and optionally incorporating a cover to minimize airflow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional differential pressure measurement methods are used, then measurement is simple, but measurement precision deteriorates when differential pressure is small (0.1 Pa order)
Solution Approach 1:
A cup-shaped member is introduced as an intermediary component between the under-floor area and the pressure sensing port. This cup creates a localized measurement space that isolates the pressure measurement from the influence of air currents, enabling accurate measurement of small differential pressures while maintaining reasonable device complexity
Solution Approach 2:
The measurement system is segmented into distinct functional components: a cup-shaped member for creating a stable measurement space, a pipe for pressure transmission, and a differential pressure measuring device. This segmentation allows each component to perform its specific function optimally, improving measurement precision without excessive complexity
2Measurement precision
If air currents are present in the measurement path, then device structure is simple, but measurement precision deteriorates due to dynamic pressure effects
Solution Approach 1:
The cup-shaped member acts as a mediator that blocks air currents from directly reaching the pressure sensing port. By creating a enclosed space, it filters out the harmful dynamic pressure effects while allowing static pressure transmission, thereby improving measurement accuracy
Solution Approach 2:
The harmful effect of air currents is extracted and isolated from the measurement path. The cup structure separates the measurement space from the airflow path, removing the influence of moving air on the pressure measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of small differential pressures by stabilizing static pressure readings, reducing measurement errors to 0.1 Pa or less, and allowing portability for measurements at different positions in the clean room.
Implementation Method 1
a cup to which the other end of the second pipe is connected and which forms a space for measuring the pressure in the under-floor area on the grating floor plate when the grating floor plate is placed
Data Source
AI summary
A differential pressure measuring device and a differential pressure measurement method that can measure the difference between the pressure in an on-floor area and the pressure in an under-floor area even when the differential pressure is small. The device includes a differential pressure measuring unit, a first pipe of which one end is connected to a first port, and a second pipe of which one end is connected to a second port; and a cup to which the other end of the second pipe is connected and which forms a space for measuring the pressure in the under-floor area on the grating floor plate. The distance in a device height direction between the other end of the first pipe and the other end of the second pipe is fixed.