Differential Pressure Regimes for OLED Deposition Control

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Solution Overview

Problem

Current techniques for depositing materials in organic light emitting diodes (OLEDs) lack precise control over deposition patterns and pressures, which can lead to inefficiencies and suboptimal performance in achieving saturated colors and uniformity in displays.

Innovation Solution

The method involves creating differential pressure regimes in various microenvironments around deposition apertures to control the deposition of materials, with higher pressure in one microenvironment and lower pressure in adjacent ones, allowing for precise control over the deposition process and pattern formation on the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition techniques are used, then the deposition process is simple, but the control over deposition patterns and pressures is imprecise

Engineering Contradiction:
Improvecontrol over deposition patternsVSAvoiddeposition device structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The deposition device is segmented into multiple independent aperture units, each capable of creating its own pressure regime. This segmentation allows precise control over deposition patterns by independently managing material flow from each aperture, directly resolving the contradiction between precision and simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different microenvironments are created with different pressure characteristics (higher pressure in first microenvironment, lower pressure in second microenvironment). This local differentiation of pressure quality enables precise control over material deposition patterns while maintaining a relatively simple overall device structure.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If uniform pressure is maintained throughout the deposition chamber, then the device operation is simple, but the deposition uniformity and performance are suboptimal

Engineering Contradiction:
Improvedeposition uniformityVSAvoidpressure control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The pressure control system is segmented into distinct zones with different pressure regimes. The first aperture creates a higher pressure microenvironment while the second aperture creates a lower pressure microenvironment, enabling precise control over material flow and deposition uniformity without requiring complex global pressure management.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The pressure parameter is changed locally in different microenvironments rather than maintaining uniform pressure throughout. By creating higher pressure in one microenvironment and lower pressure in another, the system achieves superior deposition uniformity and OLED performance while keeping the pressure control mechanism relatively simple.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If material is deposited without controlled pressure differentials, then the deposition process is fast, but the achieved color saturation and performance are suboptimal

Engineering Contradiction:
Improvecolor saturationVSAvoidpressure regime control
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Different pressure qualities are assigned to different microenvironments to optimize material deposition for achieving saturated colors. The higher pressure in the first microenvironment controls material ejection while the lower pressure in the second microenvironment controls material flow, together achieving superior color saturation without excessive complexity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The deposition process is segmented into controlled stages through multiple apertures with different pressure regimes. This segmentation allows precise control over material deposition characteristics, ensuring saturated colors and high performance while maintaining a manageable device structure.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more precise and controlled deposition of materials, improving the uniformity and performance of OLEDs, particularly in achieving saturated colors and enhancing the efficiency of the deposition process.

Implementation Method 1

creating a lower pressure regime in a second microenvironment below a second aperture located adjacent to a first aperture

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Implementation Method 2

creating a higher pressure regime in a first microenvironment below a first aperture of a deposition device by ejecting, from the first aperture, a delivery gas and a material

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Data Source

PatentUS11751468B2Controlled deposition of materials using a differential pressure regime
Publication Date: 2023.09.05 UNIVERSAL DISPLAY CORP
  • US11751468B2 patent drawing
  • US11751468B2 patent drawing
  • US11751468B2 patent drawing

AI summary

Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.