Differential Resonator Coupling Structure for Amplitude Consistency
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Solution Overview
Problem
Traditional differential resonators face challenges in achieving identical geometric dimensions for their resonators, leading to differences in amplitude outputs and poor common-mode interference suppression, resulting in low process robustness and quality factor.
Innovation Solution
The differential resonator incorporates a coupling mechanism with guide beams and coupling beams arranged symmetrically about the vibration direction, forming an annular coupling beam structure that enhances amplitude consistency and suppresses process errors, featuring elastic guide beams and integrally formed components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a traditional rectangular coupling mechanism is used to connect the first resonator and the second resonator, then the structure is simple to manufacture, but the amplitude consistency between the two resonators deteriorates due to inability to correct dimensional differences
Solution Approach 1:
The coupling mechanism transitions from a symmetric rectangular structure to an asymmetric annular structure with guide beams and coupling beams of different orientations. This asymmetric design allows differential correction of dimensional variations between the first and second resonators, improving amplitude consistency while maintaining manufacturability through the annular configuration.
Solution Approach 2:
The coupling mechanism incorporates elastic guide beams that can dynamically adjust to dimensional variations in the resonators. The elastic properties allow the coupling mechanism to adapt to manufacturing tolerances and maintain consistent amplitude response, transforming a rigid structure into a dynamically adaptive one.
2Manufacturing precision
If the geometric dimensions of the first resonator and the second resonator are made almost identical, then the amplitude-frequency response characteristics are matched, but the process robustness deteriorates due to manufacturing variability
Solution Approach 1:
The coupling mechanism is designed with adjustable parameters including the stiffness of guide beams and coupling beams, which can be tuned to compensate for dimensional variations in resonators. By changing the mechanical parameters of the coupling mechanism rather than relying on precise resonator dimensions, process robustness is improved while maintaining amplitude consistency.
Solution Approach 2:
The annular coupling mechanism provides a feedback path that automatically compensates for dimensional differences between resonators. The elastic deformation of guide beams and coupling beams creates a self-correcting system that maintains amplitude consistency without requiring precise initial manufacturing, thereby improving process robustness.
3Ease of operation
If the first resonator and the second resonator are driven by the same external force, then the differential motion mode is achieved, but the common-mode interference suppression capability deteriorates due to amplitude differences
Solution Approach 1:
The asymmetric annular coupling mechanism with guide beams positioned at different orientations creates differential stiffness characteristics that enhance common-mode rejection. The asymmetric configuration ensures that common-mode forces produce different responses in the two resonators, improving suppression capability while maintaining the differential motion mode driven by the same external force.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved differential resonator achieves better amplitude consistency and increased process robustness, enhancing the quality factor and common-mode interference suppression capabilities.
Implementation Method 1
The first guide beam and the second guide beam are made of an elastic material
Data Source
AI summary
The present disclosure provides a differential resonator and a MEMS sensor. The differential resonator includes a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator, and the first resonator and the second resonator are movably connected with the substrate. The coupling mechanism includes a first guide beam, a second guide beam, a first coupling beam, a second coupling beam, a first connecting piece and a second connecting piece. The first guide beam and the second guide beam are arranged on two opposite sides of a direction perpendicular to a vibration direction of the first resonator or the second resonator. The first coupling beam is connected with the first guide beam, the second guide beam and the first resonator. The second coupling beam is connected with the first guide beam, the second guide beam and the second resonator.