Differential Resonator Coupling Structure for Amplitude Consistency
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Solution Overview
Problem
Traditional differential resonators face challenges in achieving identical geometric dimensions, leading to inconsistent amplitude outputs and poor common-mode interference suppression due to manufacturing limitations, resulting in low process robustness and quality factor.
Innovation Solution
A differential resonator design featuring a coupling mechanism with a support shaft, symmetrically arranged force arms, and elastic connecting pieces, which maintains consistent amplitudes and robustness by limiting perpendicular displacement during external forces, enhancing the quality factor and common-mode interference suppression.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional serpentine fulcrum lever coupling mechanism is used, then the differential resonator can be manufactured, but the geometric dimensions of the first resonator and second resonator cannot be made identical due to manufacturing limitations, leading to inconsistent amplitude outputs
Solution Approach 1:
The patent changes the symmetric serpentine fulcrum lever structure to an asymmetric rigid arm coupling structure where the first force arm and second force arm have different lengths. This asymmetric design compensates for manufacturing variations in resonator dimensions, allowing the lever arm length ratio to adjust and maintain consistent amplitude outputs even when resonator geometric dimensions are not identical.
Solution Approach 2:
The patent introduces adjustable parameters in the rigid arm coupling mechanism, specifically the lever arm length ratio of the first force arm to the second force arm. By changing these geometric parameters, the system can compensate for manufacturing variations and achieve consistent amplitude outputs despite variations in resonator dimensions.
2Reliability
If the first resonator and second resonator have different amplitude outputs, then the fulcrum of the serpentine fulcrum lever has displacement in the X direction, but this causes the lever arm length ratio to change from 1:1, reducing quality factor and common-mode interference suppression capability
Solution Approach 1:
The patent segments the coupling mechanism into distinct rigid arm components with defined pivot points and force arms. This segmentation allows each component to maintain its structural integrity and geometric stability, preventing unwanted displacement and maintaining a stable lever arm length ratio during operation.
Solution Approach 2:
Instead of allowing the fulcrum to move and change the lever arm ratio (as in the traditional serpentine design), the patent inverts the approach by making the coupling arms rigid with fixed pivot points. This prevents the lever arm length ratio from changing, and any amplitude differences are handled through the rigid structure's inherent stability rather than fulcrum displacement.
3Ease of manufacture
If symmetric force arms are used in the rigid arm coupling mechanism, then the structure is simple, but it cannot compensate for manufacturing variations in resonator dimensions
Solution Approach 1:
The patent deliberately introduces asymmetry in the force arm lengths while maintaining overall structural simplicity. The first force arm and second force arm have different lengths, which compensates for manufacturing variations in the resonators. This asymmetric design is straightforward to manufacture and does not significantly increase structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved design ensures consistent amplitudes and higher quality factor, along with enhanced process robustness and common-mode interference suppression capabilities, addressing the limitations of traditional differential resonators.
Implementation Method 1
the coupling arm may not displace in a direction perpendicular to the vibration direction of the first resonator and the second resonator under the limiting action of the support shaft
Implementation Method 2
both the first connecting piece and the second connecting piece are elastic connecting pieces
Data Source
AI summary
The present disclosure provides a differential resonator and a MEMS sensor. The differential resonator includes a substrate, a first resonator, a second resonator and a coupling mechanism. The first resonator is connected with the second resonator through the coupling mechanism, and the first resonator and the second resonator are connected with the substrate and are able to be displaced relative to the substrate. The coupling mechanism includes a coupling arm, a support shaft, a first connecting piece and a second connecting piece. The coupling arm includes a first force arm, a second force arm and a coupling portion. The support shaft has one end connected with the substrate, and one other end connected with the coupling portion. The first force arm is connected with the first resonator through the first connecting piece, and the second force is connected with the second resonator through the second connecting piece.