Differentially Pumped Vibration Isolator for Leak-Safe Vacuum Coupling

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional vibration isolators for mass spectrometers are bulky and not suitable for systems requiring differential pumping, leading to vibration transmission and reduced analysis accuracy, and they increase the instrument footprint and risk of leakage.

Innovation Solution

A vibration isolator with integrated differential pumping channels and decoupling elements that seals between a vacuum pump and recipient, reducing vibration transmission and leakage while maintaining low pressures, using a collar with annular channels and o-ring decoupling elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If conventional vibration isolators are used, then vibration isolation is achieved, but the instrument footprint increases and differential pumping capability is lost

Engineering Contradiction:
Improvevibration transmissionVSAvoidinstrument footprint
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The patent combines the vibration isolation function and differential pumping function into a single integrated isolator component. The isolator includes a body with a through-bore for vacuum flow, differential pumping ports for pressure control, and damping elements for vibration reduction, thereby eliminating the need for separate vibration isolator accessories and reducing instrument footprint.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The isolator is designed to perform multiple functions simultaneously: it provides mechanical vibration isolation through damping elements, maintains differential pumping capability through dedicated ports and channels, and enables vacuum flow through its through-bore structure. This multi-functionality allows a single component to replace what would traditionally require multiple separate components.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Object-affected harmful factors

If conventional vibration isolators are used, then vibration isolation is provided, but the number of components increases and leakage risk increases

Engineering Contradiction:
Improvevibration transmissionVSAvoidnumber of components
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent integrates multiple functions into a single isolator component, reducing the total number of parts. The isolator body incorporates the through-bore for vacuum flow, differential pumping ports for pressure control, and damping elements for vibration isolation, eliminating the need for separate vibration isolator accessories and reducing the number of interfaces where leakage could occur.

Inventive Principle:
Principle #5Merging (Combining)

3Object-affected harmful factors

If conventional vibration isolators are used, then vibration damping is achieved, but differential pumping capability is lost

Engineering Contradiction:
Improvevibration transmissionVSAvoiddifferential pumping capability
Core Design Contradiction:
Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

The isolator is designed with integrated differential pumping ports and internal channels that allow pressure control while providing vibration isolation. The damping elements are positioned within the isolator body in a manner that does not obstruct the differential pumping flow paths, enabling both functions to operate simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The isolator effectively isolates vibrations and achieves low ultimate pressures with reduced components, minimizing leakage and system footprint, and improving vacuum system efficiency and cost-effectiveness.

Implementation Method 1

a first decoupling element positioned on the first face, a second decoupling element positioned on the first face and about the first decoupling element and a third decoupling element positioned on the second face, each decoupling element being configured to seal against one of the recipient and the vacuum pump

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

the collar further comprises a first differential pumping channel located between the first decoupling element and second decoupling element

Methodology Applied
Scientific EffectPressure differential pumping: Pressure Gradient

Implementation Method 3

a vibration isolator for connecting between a recipient and a vacuum pump... each decoupling element being configured to seal against one of the recipient and the vacuum pump

Methodology Applied
Scientific EffectVibration damping: Damping

Data Source

PatentEP4653703A1Differentially pumped vibration isolator
Publication Date: 2025.11.26 EDWARDS LTD
  • EP4653703A1 patent drawingFigure 1~2
  • EP4653703A1 patent drawingFigure 3~4
  • EP4653703A1 patent drawingFigure 5~6

AI summary

A vibration isolator 10 for connecting between a recipient 200 and a vacuum pump 100. The vibration isolator 10 has a collar 12 with a first face, and a second face opposite to the first face; a first decoupling element 24a positioned on the first face; a second decoupling element 24b positioned on the first face and about the first decoupling element 24a and a third decoupling element 24c positioned on the second face, wherein each decoupling element is configured to seal against one of the recipient 200 and the vacuum pump 100. The collar 12 has a differential pumping channel 26a located between the first decoupling element 24a and the second decoupling element 24b.