Diffraction Grating Module Manufacturing via Substrate Segmentation
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Solution Overview
Problem
The existing methods for manufacturing diffraction grating modules are time-consuming and complex, requiring repeated electron beam lithography or photolithography processes, making it difficult to design and produce diffraction grating elements with precise patterns, especially when changes are needed.
Innovation Solution
A method involving the creation of a module with multiple pattern areas by disposing substrates with different patterns on a base substrate, forming cutting lines corresponding to the diffraction grating elements, and removing specific areas to align and separate the substrates, allowing for the easy modulation and manufacturing of diffraction grating modules with different patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If electron beam lithography or photolithography processes are used to manufacture diffraction grating elements, then manufacturing precision can be achieved, but device complexity and manufacturing time increase significantly
Solution Approach 1:
The patent divides the manufacturing process into distinct segments: forming cutting lines on a first substrate, removing a first area, disposing a second substrate with different pattern in the removed area, and selectively removing the first substrate. This segmentation allows different pattern areas to be manufactured independently and assembled, reducing the complexity of repeatedly performing lithography processes for each element.
Solution Approach 2:
The patent uses a first substrate with a first pattern as a template or copy that can be selectively removed to reveal or transfer patterns to the second substrate. This copying approach eliminates the need to perform full lithography processes on each substrate, as the patterns are transferred or revealed through the selective removal of the first substrate in defined areas.
2Manufacturing precision
If complex lithography and etching processes are repeated for each diffraction grating element, then precise patterns can be manufactured, but productivity decreases due to time consumption
Solution Approach 1:
The patent performs preliminary actions by forming cutting lines and defining areas on the first substrate before the actual pattern transfer. The first substrate with pre-defined cutting lines and patterns is prepared in advance, allowing subsequent steps to simply involve selective removal and assembly, significantly reducing the time required for each individual diffraction grating element manufacturing.
Solution Approach 2:
The patent merges multiple manufacturing operations into a single integrated process flow: the first substrate serves as a master template that contains multiple pattern areas, and through selective removal in defined areas, multiple diffraction grating elements can be manufactured simultaneously or in sequence without repeating the full lithography process for each element.
3Adaptability or versatility
If the design of diffraction grating elements needs to be changed, then updated patterns can be produced, but loss of time and increased cost occur due to complex processes
Solution Approach 1:
The patent enables local quality changes by allowing the second substrate to have different patterns in different areas (first area, second area, third area) while maintaining the same overall structure. When design changes are needed, only the specific area requiring modification needs to be updated on the second substrate, rather than redesigning the entire diffraction grating element, thus reducing design change time and cost.
4Adaptability or versatility
If multiple diffraction grating elements with different patterns are manufactured using conventional methods, then functional requirements can be met, but the manufacturing process becomes increasingly difficult and time-consuming
Solution Approach 1:
The patent creates a universal first substrate that can serve as a master template for manufacturing multiple types of diffraction grating elements with different patterns. The first substrate contains cutting lines and patterns that can define multiple different areas, allowing a single first substrate design to produce various diffraction grating element configurations by simply changing which areas are removed and how the second substrate is configured, thereby reducing process difficulty while maintaining pattern variety.
Data Source
AI summary
A method of manufacturing a module having multiple pattern areas, a module having multiple pattern areas according to the method, and a method of manufacturing a diffraction grating module or a mold for a diffraction grating module. The method of manufacturing a module having multiple pattern areas comprises: disposing a first substrate having a first pattern on a first base substrate; forming a first cutting line on the first substrate; forming a second cutting line on the first substrate; removing any one of a first area defined by the first cutting line and a second area defined by the second cutting line from the first substrate to form a removed area on the first substrate; disposing a second base substrate having a second pattern different from the first pattern in the removed area; and removing the first substrate from the base substrate without removing the first and second areas.