Diffractive Laser Fluence Control for Multi-Point Processing

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Solution Overview

Problem

Existing laser processing systems struggle to efficiently process materials with high precision and control the energy distribution of laser beams to achieve optimal processing thresholds for both processing and non-processing points on a workpiece.

Innovation Solution

A laser processing system that includes a laser apparatus, a diffractive optical element, a focusing optical system, and an adjustment mechanism to control pulse energy, ensuring that the fluence of processing points exceeds a threshold while non-processing points remain below it, using a processor to manage these parameters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If pulse laser light is directly applied to the workpiece without energy distribution control, then processing speed can be improved, but manufacturing precision deteriorates because energy cannot be selectively applied to processing points while protecting non-processing points

Engineering Contradiction:
Improveprocessing speedVSAvoidprocessing precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The pulse laser light is divided into multiple first diffracted luminous fluxes that are selectively applied to different processing points on the workpiece. The diffractive optical element segments the single laser beam into multiple beams, allowing simultaneous processing of multiple locations while maintaining precise energy control at each point.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the workpiece receive different energy levels: processing points receive high energy fluence above the threshold for material modification, while non-processing points receive low energy fluence below the threshold. This local differentiation of energy quality enables selective processing without affecting surrounding areas.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If high pulse energy is used to ensure processing points exceed the processing threshold, then manufacturing precision can be maintained, but energy loss increases because non-processing points also receive excessive energy

Engineering Contradiction:
Improveprocessing precisionVSAvoidenergy loss
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The diffractive optical element segments the laser energy into multiple directed fluxes, each targeted at specific processing points. This segmentation ensures that energy is concentrated where needed rather than being wasted on non-processing areas, reducing overall energy loss while maintaining processing precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system changes the spatial distribution parameter of laser energy by using diffraction to create multiple luminous fluxes with different trajectories. This parameter change allows the same pulse laser light to deliver high energy to processing points while delivering minimal energy to non-processing points, optimizing both precision and energy efficiency.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If a single laser beam is used for processing, then device complexity can be reduced, but productivity decreases because multiple processing points cannot be addressed simultaneously

Engineering Contradiction:
Improvesystem complexityVSAvoidprocessing throughput
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

A single pulse laser beam is segmented by the diffractive optical element into multiple first diffracted luminous fluxes that simultaneously strike different processing points on the workpiece. This allows one laser source to perform the work of multiple lasers, increasing productivity without adding multiple laser generators.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The diffractive optical element enables a single laser beam to serve multiple functions by directing different portions of the diffracted light to different processing locations. This multi-functional capability allows one laser system to process multiple features simultaneously, improving throughput while maintaining simple device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Productivity

If diffractive optical element divides laser light into multiple fluxes, then productivity can be improved by processing multiple points, but device complexity increases due to additional optical components

Engineering Contradiction:
Improveprocessing throughputVSAvoidoptical system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The diffractive optical element acts as an intermediary between the single laser source and multiple processing points. It mediates the energy distribution by diffracting the incoming laser light into multiple fluxes with controlled spatial and energy characteristics, enabling multi-point processing without requiring multiple independent laser systems.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The diffractive optical element changes the spatial and energy parameters of the laser light through diffraction. By modifying the beam parameters (direction, focus, energy distribution), it enables a single laser beam to effectively become multiple targeted fluxes, increasing productivity without proportionally increasing device complexity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system achieves precise and efficient laser processing by optimizing energy distribution, enhancing processing speed and reducing energy loss, thereby improving the quality and efficiency of material modification.

Implementation Method 1

a diffractive optical element configured to divide the pulse laser light into multiple first diffracted luminous fluxes to be radiated to multiple processing points on a workpiece, and multiple second diffracted luminous fluxes to be radiated to multiple non-processing points on the workpiece

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

a focusing optical system configured to focus each of the first and second diffracted luminous fluxes at the workpiece

Methodology Applied
Scientific EffectFocusing: Focusing

Implementation Method 3

an adjustment mechanism configured to adjust pulse energy of the pulse laser light incident on the diffractive optical element

Methodology Applied
Scientific EffectEnergy adjustment:

Implementation Method 4

a processor configured to control the adjustment mechanism based on parameters including a processing threshold Fth of a fluence for processing the workpiece in such a way that a fluence FOKm of the first diffracted luminous fluxes at a surface of the workpiece is greater than the processing threshold Fth, and a fluence FNGm of the second diffracted luminous fluxes at the surface of the workpiece is smaller than or equal to the processing threshold Fth

Methodology Applied
Scientific EffectFluence control:

Data Source

PatentUS20250258438A1Laser processing system, laser processing method, and method for manufacturing electronic device
Publication Date: 2025.08.14 GIGAPHOTON INC
  • US20250258438A1 patent drawing
  • US20250258438A1 patent drawing
  • US20250258438A1 patent drawing

AI summary

A laser processing system includes a laser apparatus configured to output pulse laser light; a diffractive optical element configured to divide the pulse laser light into multiple first diffracted luminous fluxes to be radiated to multiple processing points on a workpiece, and multiple second diffracted luminous fluxes to be radiated to multiple non-processing points on the workpiece; a focusing optical system configured to focus each of the first and second diffracted luminous fluxes at the workpiece; an adjustment mechanism configured to adjust pulse energy of the pulse laser light incident on the diffractive optical element; and a processor configured to control the adjustment mechanism based on parameters including a processing threshold Fth of a fluence for processing the workpiece in such a way that a fluence FOKm of the first diffracted luminous fluxes at a surface of the workpiece is greater than the processing threshold Fth, and a fluence FNGm of the second diffracted luminous fluxes at the surface of the workpiece is smaller than or equal to the processing threshold Fth.