Diffusion-Bonded Fluid Panel With Integrated Reservoir and Sensing

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Solution Overview

Problem

Current process fluid panels are complex, space-intensive, and costly due to their discrete line designs, numerous fluid control components, and the challenges of maintaining fluid temperature and pressure.

Innovation Solution

A diffusion-bonded mounting panel with integrated multiple channels and vias, forming a reservoir and flow paths for process fluids, which includes temperature and pressure sensors for control, reducing the need for external reservoirs and control units.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If discrete lines and fluid control components are used to build process fluid panels, then fluid delivery functionality is achieved, but device complexity and space requirements increase significantly

Engineering Contradiction:
Improvefluid delivery system complexityVSAvoidpanel space
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The patent merges multiple discrete fluid control components (valves, flow controllers, pressure regulators, temperature controllers, and reservoirs) into a single integrated mounting panel. The panel includes a top plate with integrated reservoir, channels, and vias, and a bottom plate with mounting features, combining functions that previously required separate components into one unified structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The mounting panel serves multiple functions simultaneously: it acts as a structural support, fluid reservoir, flow distribution network (via channels and vias), and mounting platform for control components. The top plate contains a reservoir for fluid storage, channels for fluid distribution, and vias for connecting to external components, making the panel a multi-functional integrated system.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If numerous couplers, brackets, and elbows are used to route fluid lines, then fluid flow paths are established, but the risk of leaks increases

Engineering Contradiction:
Improvefluid system leak-free operationVSAvoidnumber of fluid routing components
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent eliminates multiple discrete coupling components by integrating fluid routing directly into the panel structure. Channels are formed within the panel plates themselves, and vias provide direct through-flow paths, replacing the need for numerous external couplers, brackets, and elbows that would otherwise be required to route fluid between components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts the fluid routing function from external discrete components and embeds it directly into the panel structure. The channels and vias are integral features of the mounting panel, removing the need for separate routing components and their associated connection points that could leak.

Inventive Principle:
Principle #2Taking out (Extraction)

3Temperature

If temperature control units are added to maintain fluid temperature and prevent condensation, then fluid temperature stability is improved, but device complexity and space requirements increase

Engineering Contradiction:
Improvefluid temperature stabilityVSAvoidtemperature control system complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent integrates temperature control functionality directly into the mounting panel by incorporating a temperature controller within the panel structure. The controller is mounted on the panel and thermally coupled to the fluid path, allowing temperature maintenance without requiring external temperature control units and their associated space and complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution simplifies fluid delivery systems by integrating control components and temperature/pressure management within the panel, reducing complexity, space requirements, and costs while enhancing fluid flow control and stability.

Implementation Method 1

a mounting panel including a plurality of diffusion-bonded metal plates that form: a reservoir to contain a process fluid

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Data Source

PatentUS20250035227A1Fluid delivery mounting panel and system
Publication Date: 2025.01.30 APPLIED MATERIALS INC
  • US20250035227A1 patent drawing
  • US20250035227A1 patent drawing
  • US20250035227A1 patent drawing

AI summary

An apparatus includes a mounting panel having a plurality of diffusion-bonded metal plates that form: a reservoir to contain a process fluid; and multiple channels through which to flow the process fluid, wherein at least a pair of the multiple channels are connected with the reservoir. A temperature sensor is attached to a top of the mounting panel and is in fluid communication with the reservoir through one of a plurality of vias formed in the mounting panel.