Diffusion Device Bracket Structure for Clean External Insertion
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Solution Overview
Problem
Existing substrate containers require complex operations within the container body to install diffusion devices, leading to particle generation and contamination, which compromises cleanliness and processing yields.
Innovation Solution
The design of substrate containers with brackets that have an opening larger than the retaining region allows for easier insertion of diffusion devices from outside, reducing the need for internal operations and minimizing contamination by using a receiver with a larger internal cross-sectional area at the end and a smaller retention region along the length of the bracket.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If diffusion devices are installed by snap-fitting operations within the container body, then the diffusion devices can be securely retained, but complex internal operations generate particles and contaminants that compromise cleanliness
Solution Approach 1:
Instead of inserting the diffusion device from the interior of the container body, the invention inverts the insertion direction by providing an opening in the container wall that allows the diffusion device to be inserted from the exterior. This reversal eliminates the need for complex internal snap-fitting operations, thereby reducing particle generation and contamination while maintaining secure retention through the bracket structure
2Ease of operation
If the receiver opening is larger than the retention region, then diffusion devices can be easily inserted from outside the container, but the structural complexity of the bracket increases
Solution Approach 1:
The bracket structure is segmented into two distinct functional regions: a receiver portion with a larger opening designed for easy insertion of the diffusion device from the exterior, and a retention region with a smaller cross-sectional area that secures the device once inserted. This segmentation allows each region to optimize its specific function while maintaining an overall simple bracket design that integrates both regions
Data Source
AI summary
Brackets are provided on an interior of a substrate container to receive and retain a diffusion device. The brackets include an receiver having a first internal cross-sectional area and a retention region having a second internal cross-sectional area, with the first internal cross-sectional area being larger than the second internal cross-sectional area. The bracket can include a second receiver on an opposite end of the bracket from the first receiver, such that the bracket can be inverted for use on either side of the substrate container. The brackets can receive diffusion devices when the diffusion devices are inserted from an exterior of the substrate container.