Diffusion Cover Concave Portion for Gas Injection Apparatus
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Solution Overview
Problem
Existing gas injection apparatuses in layer deposition processes suffer from suboptimal flow quality and diffusion performance due to the lack of research on the specific shape and structure of their metal parts, which affects the even distribution and diffusion of process gases on substrates.
Innovation Solution
A gas injection apparatus with a specific shape and structure, including a supply block, diffusion cover, spray nozzles, and shower head, where the diffusion cover features a concave portion with radial extension areas and strategically positioned supply holes, optimized to improve gas flow and diffusion characteristics, and the parts are assembled using diffusion bonding for enhanced airtightness and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple layers of metal parts are stacked and fixed with bolts, then the gas injection apparatus can be assembled and mounted in the process chamber, but the flow quality and diffusion performance of the process gas are not improved
Solution Approach 1:
The gas injection apparatus is divided into multiple functional layers (supply block, diffusion cover, shower head) with each layer having specific gas distribution functions. The diffusion cover is segmented into multiple diffusion holes that independently control gas flow to different regions, enabling precise optimization of gas distribution patterns while maintaining assembly stability.
Solution Approach 2:
Different regions of the diffusion cover are designed with different numbers and distributions of diffusion holes to create non-uniform gas flow patterns. The supply block has centrally located gas ports that feed into strategically positioned diffusion holes, creating localized high-density gas regions that improve deposition uniformity across the substrate surface.
2Ease of manufacture
If a conventional multi-layer structure is used, then the apparatus can be manufactured and assembled, but the process gas does not diffuse evenly across the substrate surface
Solution Approach 1:
The diffusion cover acts as an intermediary component between the supply block and shower head. It receives concentrated gas from the central supply ports and redistributes it through multiple diffusion holes to create uniform gas distribution across the substrate. This intermediary structure transforms the gas flow pattern without requiring complex modifications to the supply block or shower head.
Solution Approach 2:
The invention transitions from a simple planar gas distribution approach to a three-dimensional diffusion structure. Gas flows vertically through the supply block, then radially distributes through the diffusion cover's multiple holes, and finally spreads across the shower head surface. This multi-dimensional flow path enables uniform gas distribution while maintaining simple component geometries.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves improved flow characteristics and diffusion performance, ensuring uniform gas distribution across the substrate, even with larger shower head sizes, and maintains airtightness and fastening integrity.
Implementation Method 1
a diffusion cover under the supply block, the diffusion cover comprising a branch duct that is connected to the central gas ports; a plurality of spray nozzles on a lower surface of the diffusion cover and connected to the branch duct
Implementation Method 2
chemical vapor deposition (CVD) is a method of simultaneously spraying a reaction gas to deposit the reaction gas on a substrate
Data Source
AI summary
A gas injection apparatus includes a supply block including central gas ports configured to supply a process gas provided from a gas supply source; a diffusion cover under the supply block and including a branch duct which is connected to the central gas ports; a plurality of spray nozzles on a lower surface of the diffusion cover and connected to the branch duct, the plurality of spray nozzles configured to spray the process gas; and a shower head under the plurality of spray nozzles and including a plurality of spray holes vertically passing through the shower head, the plurality of spray holes configured to evenly spray the process gas sprayed by the plurality of spray nozzles. The diffusion cover further includes a concave portion at an upper surface thereof, the concave portion facing the central gas ports and concaved downward.