Diffusion Prevention Layer Hydrogen Ratio for Film Separation
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Solution Overview
Problem
Existing photoelectric conversion devices face challenges in reducing film separation between conductive and diffusion prevention layers, which affects manufacturing yield and quality, particularly due to stress and composition ratios of hydrogen atoms in diffusion prevention layers.
Innovation Solution
A photoelectric conversion device is designed with a semiconductor substrate, conductive layers, and a light guide, where the diffusion prevention layers contain hydrogen and carbon atoms, with a specific composition ratio of hydrogen atoms between 46% and 50% to reduce film separation and improve adhesion between layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a diffusion prevention layer is formed over a conductive layer, then oxidation and diffusion of copper are prevented, but film separation occurs between the layers
Solution Approach 1:
The invention changes the hydrogen atom composition ratio parameter of the diffusion prevention layer to 46-50 at%, which optimizes the chemical composition to prevent film separation while maintaining the diffusion prevention function. This specific parameter range creates optimal bonding conditions between the conductive layer and diffusion prevention layer.
Solution Approach 2:
The invention uses a composite material structure where the diffusion prevention layer contains both hydrogen atoms and carbon atoms in specific ratios. This composite composition provides both adhesion to the conductive layer and effective diffusion prevention, resolving the contradiction between bonding strength and diffusion barrier function.
2Strength
If the hydrogen atom composition ratio in the diffusion prevention layer is increased, then film separation is reduced, but the composition must be precisely controlled within a narrow range
Solution Approach 1:
The invention defines a specific parameter range (46-50 at% hydrogen) that balances adhesion improvement with manufacturing feasibility. This range is narrow enough to ensure optimal performance but wide enough to allow for normal manufacturing variations, making precise control achievable in practice.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses film separation, enhancing the yield rate of photoelectric conversion devices and preventing contamination of manufacturing apparatus, leading to improved device quality and reduced production costs.
Implementation Method 1
the first diffusion prevention layer contains hydrogen atoms and carbon atoms, and a composition ratio of the hydrogen atoms is greater than or equal to 46 at % and less than or equal to 50 at %
Data Source
AI summary
Provided is a photoelectric conversion device including: a semiconductor substrate having a photoelectric conversion unit; a first conductive layer formed over the semiconductor substrate; a first diffusion prevention layer formed over the first conductive layer; and a light guide that guides an incident light into the photoelectric conversion unit, in which the first diffusion prevention layer contains hydrogen atoms and carbon atoms, and a composition ratio of the hydrogen atoms is greater than or equal to 46 at % and less than or equal to 50 at %.