Digital Direct Imaging Contour Description for Lithography
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Solution Overview
Problem
Current maskless lithography technologies face challenges with high computing load in raster image processing workstations, real-time geometric scaling/rotation correction, and excessive data transmission and storage requirements due to increased image resolution and size.
Innovation Solution
A method and system for digital direct imaging that converts vector-based images into polygon-based contour descriptions, performs geometric optimization and correction using marks on substrates, and partitions images into blocks for efficient rasterization and imaging, reducing computational load and data volume.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If image resolution is increased tenfold and image size is expanded 100 times, then image quality is improved, but computing load in RIP workstation increases
Solution Approach 1:
The patent divides the high-resolution image into multiple blocks, where each block is further divided into image units. This segmentation allows the RIP workstation to process smaller portions independently, reducing the peak computing load while maintaining overall image quality. The contour description format enables efficient processing of segmented blocks without requiring full-image computation.
Solution Approach 2:
The patent changes the representation parameter from full raster image data to contour description format. By describing images through contour lines and geometric features rather than pixel-by-pixel data, the computational complexity is reduced while preserving image quality. This parameter transformation enables efficient processing of high-resolution images.
2Measurement precision
If image resolution is increased tenfold and image size is expanded 100 times, then image quality is improved, but data transmission and storage requirements increase
Solution Approach 1:
The patent extracts only the essential features of the image - the contour descriptions - rather than transmitting or storing complete high-resolution pixel data. By taking out only the necessary geometric information needed to reconstruct the image, data volume is dramatically reduced while image quality is preserved through accurate contour representation.
Solution Approach 2:
The patent transforms the data representation from full pixel arrays to contour description parameters. This parameter change reduces data volume by representing complex images through simplified geometric descriptions, enabling efficient transmission and storage while maintaining the ability to generate high-quality images at the exposure device.
3Manufacturing precision
If real-time geometric scaling/rotation correction is implemented, then alignment precision is improved, but computing load increases
Solution Approach 1:
The patent performs geometric correction calculations in advance using the contour description format, which reduces computational complexity. By pre-calculating correction parameters based on mark positions and storing them for later application, the system achieves real-time alignment precision without excessive computing load during the actual imaging process.
Solution Approach 2:
The patent changes the computation approach by working with contour description parameters rather than full image data. This parameter transformation enables geometric scaling and rotation corrections to be performed with reduced computational requirements, as transformations are applied to simplified geometric representations rather than pixel arrays.
Data Source
AI summary
A method and a system for digital direct imaging, an image generating method and an electronic device are provided. The method for digital direct imaging includes: obtaining a first image of a first format; converting the first image into a second image of a second format, wherein the second image includes a contour description; generating a correction parameter according to at least one mark on a substrate; correcting the second image according to the contour description and the correction parameter; and performing a rasterization operation on the corrected second image and imaging the second image processed by the rasterization operation on the substrate by an exposure device.