Frequency-Adjustable Digital Power System for Plasma
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Solution Overview
Problem
Current plasma processing equipment for semiconductor manufacturing has high construction costs and large volume due to independent wiring and power supplies for each component, making it challenging to design a medium- and high-power frequency-adjustable digital power system for stable plasma power supply.
Innovation Solution
A medium- and high-power frequency-adjustable digital power system incorporating a switch switching circuit, output sampling circuit, microcontroller, step-up transformer, and driver circuit, which converts AC input power into a high-voltage AC output power source for plasma applications, with the microcontroller generating control signals to manage switch operation and provide protection against over/under voltage and current.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If independent wiring and power supplies are used for each component (power supply module, control interface, motor, gas control part), then each component can operate independently and reliably, but the construction cost increases and the volume becomes large
Solution Approach 1:
The patent combines multiple independent components (power supply module, control interface, motor driver, gas control part) into a single integrated plasma power supply device. The microcontroller unit centrally controls all functions, merging what were previously separate systems with independent wiring into one unified device, thereby reducing construction cost and volume while maintaining operational reliability through centralized digital control
2Reliability
If a medium- and high-power frequency-adjustable digital power system is designed for plasma power supply, then power stability and flexibility are enhanced, but system complexity and manufacturing difficulty increase
Solution Approach 1:
The patent replaces traditional analog control mechanisms with a digital control system based on a microcontroller unit. The microcontroller receives digital input signals and generates PWM control signals for the switch switching circuit, enabling frequency-adjustable power output with high stability. This digital substitution simplifies manufacturing compared to precision analog circuits while providing programmable frequency adjustment and stable plasma power supply
Solution Approach 2:
The patent implements frequency-adjustable power output by allowing the microcontroller to vary the switching frequency of the PWM signals generated for the switch switching circuit. This parameter change capability enables the system to adapt to different plasma processing requirements while maintaining stable power delivery, and the digital control approach makes frequency adjustment straightforward to manufacture and implement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces occupied area and construction costs by digital processing, enabling efficient power management and frequency adjustment, with the AC output power source capable of providing up to 1200 watts as a high voltage for plasma power supply, enhancing stability and flexibility.
Implementation Method 1
The switch switching circuit has a plurality of switches, receives an AC input power source and converts the AC input power source into an output power source
Implementation Method 2
The step-up transformer is electrically coupled to the switch switching circuit, receives the output power source, and steps up the output power source to provide an AC output power source
Implementation Method 3
The analog-to-digital conversion unit receives the output voltage and the output current, and converts the output voltage and the output voltage into a digital voltage signal and a digital current signal
Data Source
AI summary
A medium- and high-power frequency adjustable digital power system includes a switch switching circuit, an output sampling circuit, and a microcontroller. The switch switching circuit has a plurality of switches, receives an AC input power source and converts the AC input power source into an output power source. The output sampling circuit receives an output voltage and an output current of the output power source. The microcontroller receives the output voltage and the output current, and generates a plurality of control signals according to power information calculated by the output voltage and the output current to correspondingly control turning on and turning off the switches.