Diluted Solution Production via Tank Pressure Control
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Solution Overview
Problem
Existing methods for producing diluted solutions, such as those used in semiconductor and liquid crystal display manufacturing, face challenges including uneven chemical liquid concentration, complex apparatus structures, and difficulty in achieving precise concentration control due to fluctuations in flow rate and chemical concentration.
Innovation Solution
A method and apparatus that control the pressure in a tank storing a high concentration liquid based on measured flow rate and component concentration of the diluted solution, using a first pipe for the diluent medium and a second pipe to add the chemical liquid, ensuring precise adjustment of the component concentration through a pressure gradient managed by a controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a chemical liquid supply pump is used to add chemical liquid to ultrapure water, then the diluted solution can be produced, but uneven concentration occurs due to pulsation of the pump
Solution Approach 1:
The patent replaces the mechanical chemical liquid supply pump with a pressure control system that uses gas pressure to supply chemical liquid. This substitution eliminates the pulsation caused by mechanical pump operation, resulting in more uniform concentration of the diluted solution while maintaining reliable supply.
2Manufacturing precision
If a plurality of small pipes with valves are installed to control chemical liquid addition, then the amount of chemical liquid can be controlled, but the apparatus structure becomes complex
Solution Approach 1:
The patent extracts and eliminates the complex plurality of small pipes and valves from the system. Instead, it uses a single chemical liquid supply pipe combined with a pressure control system that regulates the amount of chemical liquid added through pressure adjustment, thereby achieving accurate concentration control without increasing apparatus complexity.
3Ease of operation
If pressure in chemical liquid storage container is adjusted based only on flow rate, then the system is simple to operate, but concentration deviation occurs due to vaporization or degradation
Solution Approach 1:
The patent implements a feedback control system where the pressure in the chemical liquid storage container is adjusted based on both the flow rate of cleaning liquid and the measured concentration of the diluted solution. This dual-parameter feedback mechanism maintains operation simplicity while preventing concentration deviation caused by vaporization or degradation, thereby ensuring accurate concentration control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the precise production of a diluted solution with a specified concentration, maintaining accuracy even with fluctuations in flow rate and chemical concentration, and simplifies the apparatus structure compared to existing methods.
Implementation Method 1
controlling pressure in a tank that stores the second liquid so as to add, through a second pipe that connects the tank to the first pipe, the second liquid to the first liquid flowing through the first pipe
Data Source
AI summary
A diluted solution production method of the present invention is a diluted solution production method of producing a diluted solution of a second liquid by adding the second liquid a first liquid, the method including feeding the first liquid to a first pipe; and controlling pressure in a tank that stores the second liquid to add, through the second pipe that connects the tank to the first pipe, the second liquid to the first liquid in the first pipe. Adding the second liquid includes measuring a flow rate of the first liquid or the diluted solution that flows through the first pipe; measuring a component concentration of the diluted solution; and controlling the pressure in the tank, based on the measured values of the flow rate and the component concentration, so as to adjust the component concentration of the diluted solution to a specified value.